9/15/2010	7:31:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	7:31:30 AM	Recipe started at 7:31 AM
9/15/2010	7:31:30 AM	H2 valve closed
9/15/2010	7:31:30 AM	BCl3 valve closed
9/15/2010	7:31:30 AM	PH3 valve closed
9/15/2010	7:31:30 AM	SiCl4 pre valve closed
9/15/2010	7:31:30 AM	SiCl4 post valve closed
9/15/2010	7:31:30 AM	Main Vac valve closed
9/15/2010	7:31:30 AM	Bypass valve closed
9/15/2010	7:31:30 AM	Bubbler valve closed
9/15/2010	7:31:30 AM	Helium valve opened
9/15/2010	7:31:30 AM	Helium MFC set to  500.000000
9/15/2010	7:31:30 AM	H2 MFC set to  0.000000
9/15/2010	7:31:30 AM	BCl3 MFC set to  0.000000
9/15/2010	7:31:30 AM	PHl3 MFC set to  0.000000
9/15/2010	7:31:30 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:31:30 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:31:30 AM	Tube furnace set to 0
9/15/2010	7:32:50 AM	Helium valve closed
9/15/2010	7:32:50 AM	H2 valve closed
9/15/2010	7:32:50 AM	BCl3 valve closed
9/15/2010	7:32:50 AM	PH3 valve closed
9/15/2010	7:32:50 AM	SiCl4 pre valve closed
9/15/2010	7:32:50 AM	SiCl4 post valve closed
9/15/2010	7:32:50 AM	Main Vac valve closed
9/15/2010	7:32:50 AM	Bypass valve closed
9/15/2010	7:32:50 AM	Bubbler valve closed
9/15/2010	7:32:50 AM	Helium MFC set to  0.000000
9/15/2010	7:32:50 AM	H2 MFC set to  0.000000
9/15/2010	7:32:50 AM	BCl3 MFC set to  0.000000
9/15/2010	7:32:50 AM	PHl3 MFC set to  0.000000
9/15/2010	7:32:50 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:32:50 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:32:50 AM	Tube furnace set to 0
9/15/2010	7:32:51 AM	Run finished at 7:32 AM
9/15/2010	7:32:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	7:34:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	7:35:00 AM	Recipe started at 7:35 AM
9/15/2010	7:35:00 AM	Helium valve closed
9/15/2010	7:35:00 AM	H2 valve closed
9/15/2010	7:35:00 AM	BCl3 valve closed
9/15/2010	7:35:00 AM	PH3 valve closed
9/15/2010	7:35:00 AM	SiCl4 pre valve closed
9/15/2010	7:35:00 AM	SiCl4 post valve closed
9/15/2010	7:35:00 AM	Main Vac valve closed
9/15/2010	7:35:00 AM	Bubbler valve closed
9/15/2010	7:35:00 AM	Bypass valve opened
9/15/2010	7:35:00 AM	Helium MFC set to  0.000000
9/15/2010	7:35:00 AM	H2 MFC set to  0.000000
9/15/2010	7:35:00 AM	BCl3 MFC set to  0.000000
9/15/2010	7:35:00 AM	PHl3 MFC set to  0.000000
9/15/2010	7:35:00 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:35:00 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:35:00 AM	Tube furnace set to 0
9/15/2010	7:35:40 AM	Helium valve closed
9/15/2010	7:35:40 AM	H2 valve closed
9/15/2010	7:35:40 AM	BCl3 valve closed
9/15/2010	7:35:40 AM	PH3 valve closed
9/15/2010	7:35:40 AM	SiCl4 pre valve closed
9/15/2010	7:35:40 AM	SiCl4 post valve closed
9/15/2010	7:35:40 AM	Bubbler valve closed
9/15/2010	7:35:40 AM	Main Vac valve opened
9/15/2010	7:35:40 AM	Bypass valve opened
9/15/2010	7:35:40 AM	Helium MFC set to  0.000000
9/15/2010	7:35:40 AM	H2 MFC set to  0.000000
9/15/2010	7:35:40 AM	BCl3 MFC set to  0.000000
9/15/2010	7:35:40 AM	PHl3 MFC set to  0.000000
9/15/2010	7:35:40 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:35:40 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:35:40 AM	Tube furnace set to 0
9/15/2010	7:35:40 AM	Run finished at 7:35 AM
9/15/2010	7:35:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	7:36:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	7:36:35 AM	Recipe started at 7:36 AM
9/15/2010	7:36:35 AM	Helium valve closed
9/15/2010	7:36:35 AM	H2 valve closed
9/15/2010	7:36:35 AM	BCl3 valve closed
9/15/2010	7:36:35 AM	PH3 valve closed
9/15/2010	7:36:35 AM	SiCl4 pre valve closed
9/15/2010	7:36:35 AM	SiCl4 post valve closed
9/15/2010	7:36:35 AM	Main Vac valve closed
9/15/2010	7:36:35 AM	Bubbler valve closed
9/15/2010	7:36:35 AM	Bypass valve opened
9/15/2010	7:36:35 AM	Helium MFC set to  0.000000
9/15/2010	7:36:35 AM	H2 MFC set to  0.000000
9/15/2010	7:36:35 AM	BCl3 MFC set to  0.000000
9/15/2010	7:36:35 AM	PHl3 MFC set to  0.000000
9/15/2010	7:36:35 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:36:35 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:36:35 AM	Tube furnace set to 0
9/15/2010	7:36:35 AM	Helium valve closed
9/15/2010	7:36:35 AM	H2 valve closed
9/15/2010	7:36:35 AM	BCl3 valve closed
9/15/2010	7:36:35 AM	PH3 valve closed
9/15/2010	7:36:35 AM	SiCl4 pre valve closed
9/15/2010	7:36:35 AM	SiCl4 post valve closed
9/15/2010	7:36:35 AM	Bubbler valve closed
9/15/2010	7:36:35 AM	Main Vac valve opened
9/15/2010	7:36:36 AM	Bypass valve opened
9/15/2010	7:36:36 AM	Helium MFC set to  0.000000
9/15/2010	7:36:36 AM	H2 MFC set to  0.000000
9/15/2010	7:36:36 AM	BCl3 MFC set to  0.000000
9/15/2010	7:36:36 AM	PHl3 MFC set to  0.000000
9/15/2010	7:36:36 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:36:36 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:36:36 AM	Tube furnace set to 0
9/15/2010	7:37:36 AM	H2 valve closed
9/15/2010	7:37:36 AM	BCl3 valve closed
9/15/2010	7:37:36 AM	PH3 valve closed
9/15/2010	7:37:36 AM	SiCl4 pre valve closed
9/15/2010	7:37:36 AM	SiCl4 post valve closed
9/15/2010	7:37:36 AM	Bubbler valve closed
9/15/2010	7:37:36 AM	Helium valve opened
9/15/2010	7:37:36 AM	Main Vac valve opened
9/15/2010	7:37:36 AM	Bypass valve opened
9/15/2010	7:37:36 AM	Helium MFC set to  100.000000
9/15/2010	7:37:36 AM	H2 MFC set to  0.000000
9/15/2010	7:37:36 AM	BCl3 MFC set to  0.000000
9/15/2010	7:37:36 AM	PHl3 MFC set to  0.000000
9/15/2010	7:37:36 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:37:36 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:37:36 AM	Tube furnace set to 0
9/15/2010	7:38:36 AM	Helium valve closed
9/15/2010	7:38:36 AM	H2 valve closed
9/15/2010	7:38:36 AM	BCl3 valve closed
9/15/2010	7:38:36 AM	PH3 valve closed
9/15/2010	7:38:36 AM	SiCl4 pre valve closed
9/15/2010	7:38:36 AM	SiCl4 post valve closed
9/15/2010	7:38:36 AM	Bubbler valve closed
9/15/2010	7:38:36 AM	Main Vac valve opened
9/15/2010	7:38:36 AM	Bypass valve opened
9/15/2010	7:38:36 AM	Helium MFC set to  0.000000
9/15/2010	7:38:36 AM	H2 MFC set to  0.000000
9/15/2010	7:38:36 AM	BCl3 MFC set to  0.000000
9/15/2010	7:38:36 AM	PHl3 MFC set to  0.000000
9/15/2010	7:38:36 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:38:36 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:38:36 AM	Tube furnace set to 0
9/15/2010	7:39:36 AM	H2 valve closed
9/15/2010	7:39:36 AM	BCl3 valve closed
9/15/2010	7:39:36 AM	PH3 valve closed
9/15/2010	7:39:36 AM	SiCl4 pre valve closed
9/15/2010	7:39:36 AM	SiCl4 post valve closed
9/15/2010	7:39:36 AM	Bubbler valve closed
9/15/2010	7:39:36 AM	Helium valve opened
9/15/2010	7:39:36 AM	Main Vac valve opened
9/15/2010	7:39:36 AM	Bypass valve opened
9/15/2010	7:39:36 AM	Helium MFC set to  100.000000
9/15/2010	7:39:36 AM	H2 MFC set to  0.000000
9/15/2010	7:39:36 AM	BCl3 MFC set to  0.000000
9/15/2010	7:39:36 AM	PHl3 MFC set to  0.000000
9/15/2010	7:39:36 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:39:36 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:39:36 AM	Tube furnace set to 0
9/15/2010	7:40:36 AM	Helium valve closed
9/15/2010	7:40:36 AM	H2 valve closed
9/15/2010	7:40:36 AM	BCl3 valve closed
9/15/2010	7:40:36 AM	PH3 valve closed
9/15/2010	7:40:36 AM	SiCl4 pre valve closed
9/15/2010	7:40:36 AM	SiCl4 post valve closed
9/15/2010	7:40:36 AM	Bubbler valve closed
9/15/2010	7:40:36 AM	Main Vac valve opened
9/15/2010	7:40:36 AM	Bypass valve opened
9/15/2010	7:40:36 AM	Helium MFC set to  0.000000
9/15/2010	7:40:36 AM	H2 MFC set to  0.000000
9/15/2010	7:40:36 AM	BCl3 MFC set to  0.000000
9/15/2010	7:40:36 AM	PHl3 MFC set to  0.000000
9/15/2010	7:40:36 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:40:36 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:40:36 AM	Tube furnace set to 0
9/15/2010	7:41:37 AM	H2 valve closed
9/15/2010	7:41:37 AM	BCl3 valve closed
9/15/2010	7:41:37 AM	PH3 valve closed
9/15/2010	7:41:37 AM	SiCl4 pre valve closed
9/15/2010	7:41:37 AM	SiCl4 post valve closed
9/15/2010	7:41:37 AM	Bubbler valve closed
9/15/2010	7:41:37 AM	Helium valve opened
9/15/2010	7:41:37 AM	Main Vac valve opened
9/15/2010	7:41:37 AM	Bypass valve opened
9/15/2010	7:41:37 AM	Helium MFC set to  100.000000
9/15/2010	7:41:37 AM	H2 MFC set to  0.000000
9/15/2010	7:41:37 AM	BCl3 MFC set to  0.000000
9/15/2010	7:41:37 AM	PHl3 MFC set to  0.000000
9/15/2010	7:41:37 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:41:37 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:41:37 AM	Tube furnace set to 0
9/15/2010	7:42:37 AM	Helium valve closed
9/15/2010	7:42:37 AM	H2 valve closed
9/15/2010	7:42:37 AM	BCl3 valve closed
9/15/2010	7:42:37 AM	PH3 valve closed
9/15/2010	7:42:37 AM	SiCl4 pre valve closed
9/15/2010	7:42:37 AM	SiCl4 post valve closed
9/15/2010	7:42:37 AM	Bubbler valve closed
9/15/2010	7:42:37 AM	Main Vac valve opened
9/15/2010	7:42:37 AM	Bypass valve opened
9/15/2010	7:42:37 AM	Helium MFC set to  0.000000
9/15/2010	7:42:37 AM	H2 MFC set to  0.000000
9/15/2010	7:42:37 AM	BCl3 MFC set to  0.000000
9/15/2010	7:42:37 AM	PHl3 MFC set to  0.000000
9/15/2010	7:42:37 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:42:37 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:42:37 AM	Tube furnace set to 0
9/15/2010	7:43:37 AM	H2 valve closed
9/15/2010	7:43:37 AM	BCl3 valve closed
9/15/2010	7:43:37 AM	PH3 valve closed
9/15/2010	7:43:37 AM	SiCl4 pre valve closed
9/15/2010	7:43:37 AM	SiCl4 post valve closed
9/15/2010	7:43:37 AM	Bubbler valve closed
9/15/2010	7:43:37 AM	Helium valve opened
9/15/2010	7:43:37 AM	Main Vac valve opened
9/15/2010	7:43:37 AM	Bypass valve opened
9/15/2010	7:43:37 AM	Helium MFC set to  100.000000
9/15/2010	7:43:37 AM	H2 MFC set to  0.000000
9/15/2010	7:43:37 AM	BCl3 MFC set to  0.000000
9/15/2010	7:43:37 AM	PHl3 MFC set to  0.000000
9/15/2010	7:43:37 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:43:37 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:43:37 AM	Tube furnace set to 0
9/15/2010	7:44:37 AM	Helium valve closed
9/15/2010	7:44:37 AM	H2 valve closed
9/15/2010	7:44:37 AM	BCl3 valve closed
9/15/2010	7:44:37 AM	PH3 valve closed
9/15/2010	7:44:37 AM	SiCl4 pre valve closed
9/15/2010	7:44:37 AM	SiCl4 post valve closed
9/15/2010	7:44:37 AM	Bubbler valve closed
9/15/2010	7:44:37 AM	Main Vac valve opened
9/15/2010	7:44:37 AM	Bypass valve opened
9/15/2010	7:44:37 AM	Helium MFC set to  0.000000
9/15/2010	7:44:37 AM	H2 MFC set to  0.000000
9/15/2010	7:44:37 AM	BCl3 MFC set to  0.000000
9/15/2010	7:44:37 AM	PHl3 MFC set to  0.000000
9/15/2010	7:44:37 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:44:37 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:44:37 AM	Tube furnace set to 0
9/15/2010	7:45:37 AM	H2 valve closed
9/15/2010	7:45:37 AM	BCl3 valve closed
9/15/2010	7:45:37 AM	PH3 valve closed
9/15/2010	7:45:37 AM	SiCl4 pre valve closed
9/15/2010	7:45:37 AM	SiCl4 post valve closed
9/15/2010	7:45:37 AM	Bubbler valve closed
9/15/2010	7:45:37 AM	Helium valve opened
9/15/2010	7:45:37 AM	Main Vac valve opened
9/15/2010	7:45:37 AM	Bypass valve opened
9/15/2010	7:45:37 AM	Helium MFC set to  100.000000
9/15/2010	7:45:37 AM	H2 MFC set to  0.000000
9/15/2010	7:45:37 AM	BCl3 MFC set to  0.000000
9/15/2010	7:45:37 AM	PHl3 MFC set to  0.000000
9/15/2010	7:45:37 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:45:37 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:45:37 AM	Tube furnace set to 0
9/15/2010	7:46:37 AM	Helium valve closed
9/15/2010	7:46:37 AM	H2 valve closed
9/15/2010	7:46:37 AM	BCl3 valve closed
9/15/2010	7:46:37 AM	PH3 valve closed
9/15/2010	7:46:37 AM	SiCl4 pre valve closed
9/15/2010	7:46:37 AM	SiCl4 post valve closed
9/15/2010	7:46:37 AM	Bubbler valve closed
9/15/2010	7:46:37 AM	Main Vac valve opened
9/15/2010	7:46:37 AM	Bypass valve opened
9/15/2010	7:46:37 AM	Helium MFC set to  0.000000
9/15/2010	7:46:37 AM	H2 MFC set to  0.000000
9/15/2010	7:46:37 AM	BCl3 MFC set to  0.000000
9/15/2010	7:46:37 AM	PHl3 MFC set to  0.000000
9/15/2010	7:46:37 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:46:37 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:46:38 AM	Tube furnace set to 0
9/15/2010	7:47:38 AM	H2 valve closed
9/15/2010	7:47:38 AM	BCl3 valve closed
9/15/2010	7:47:38 AM	PH3 valve closed
9/15/2010	7:47:38 AM	SiCl4 pre valve closed
9/15/2010	7:47:38 AM	SiCl4 post valve closed
9/15/2010	7:47:38 AM	Bubbler valve closed
9/15/2010	7:47:38 AM	Helium valve opened
9/15/2010	7:47:38 AM	Main Vac valve opened
9/15/2010	7:47:38 AM	Bypass valve opened
9/15/2010	7:47:38 AM	Helium MFC set to  100.000000
9/15/2010	7:47:38 AM	H2 MFC set to  0.000000
9/15/2010	7:47:38 AM	BCl3 MFC set to  0.000000
9/15/2010	7:47:38 AM	PHl3 MFC set to  0.000000
9/15/2010	7:47:38 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:47:38 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:47:38 AM	Tube furnace set to 0
9/15/2010	7:48:38 AM	Helium valve closed
9/15/2010	7:48:38 AM	H2 valve closed
9/15/2010	7:48:38 AM	BCl3 valve closed
9/15/2010	7:48:38 AM	PH3 valve closed
9/15/2010	7:48:38 AM	SiCl4 pre valve closed
9/15/2010	7:48:38 AM	SiCl4 post valve closed
9/15/2010	7:48:38 AM	Bubbler valve closed
9/15/2010	7:48:38 AM	Main Vac valve opened
9/15/2010	7:48:38 AM	Bypass valve opened
9/15/2010	7:48:38 AM	Helium MFC set to  0.000000
9/15/2010	7:48:38 AM	H2 MFC set to  0.000000
9/15/2010	7:48:38 AM	BCl3 MFC set to  0.000000
9/15/2010	7:48:38 AM	PHl3 MFC set to  0.000000
9/15/2010	7:48:38 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:48:38 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:48:38 AM	Tube furnace set to 0
9/15/2010	7:49:38 AM	H2 valve closed
9/15/2010	7:49:38 AM	BCl3 valve closed
9/15/2010	7:49:38 AM	PH3 valve closed
9/15/2010	7:49:38 AM	SiCl4 pre valve closed
9/15/2010	7:49:38 AM	SiCl4 post valve closed
9/15/2010	7:49:38 AM	Bubbler valve closed
9/15/2010	7:49:38 AM	Helium valve opened
9/15/2010	7:49:38 AM	Main Vac valve opened
9/15/2010	7:49:38 AM	Bypass valve opened
9/15/2010	7:49:38 AM	Helium MFC set to  100.000000
9/15/2010	7:49:38 AM	H2 MFC set to  0.000000
9/15/2010	7:49:38 AM	BCl3 MFC set to  0.000000
9/15/2010	7:49:38 AM	PHl3 MFC set to  0.000000
9/15/2010	7:49:38 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:49:38 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:49:38 AM	Tube furnace set to 0
9/15/2010	7:50:38 AM	Helium valve closed
9/15/2010	7:50:38 AM	H2 valve closed
9/15/2010	7:50:38 AM	BCl3 valve closed
9/15/2010	7:50:38 AM	PH3 valve closed
9/15/2010	7:50:38 AM	SiCl4 pre valve closed
9/15/2010	7:50:38 AM	SiCl4 post valve closed
9/15/2010	7:50:38 AM	Bubbler valve closed
9/15/2010	7:50:38 AM	Main Vac valve opened
9/15/2010	7:50:38 AM	Bypass valve opened
9/15/2010	7:50:38 AM	Helium MFC set to  0.000000
9/15/2010	7:50:38 AM	H2 MFC set to  0.000000
9/15/2010	7:50:38 AM	BCl3 MFC set to  0.000000
9/15/2010	7:50:38 AM	PHl3 MFC set to  0.000000
9/15/2010	7:50:38 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:50:38 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:50:38 AM	Tube furnace set to 0
9/15/2010	7:51:38 AM	H2 valve closed
9/15/2010	7:51:38 AM	BCl3 valve closed
9/15/2010	7:51:38 AM	PH3 valve closed
9/15/2010	7:51:38 AM	SiCl4 pre valve closed
9/15/2010	7:51:38 AM	SiCl4 post valve closed
9/15/2010	7:51:38 AM	Bubbler valve closed
9/15/2010	7:51:38 AM	Helium valve opened
9/15/2010	7:51:38 AM	Main Vac valve opened
9/15/2010	7:51:38 AM	Bypass valve opened
9/15/2010	7:51:39 AM	Helium MFC set to  100.000000
9/15/2010	7:51:39 AM	H2 MFC set to  0.000000
9/15/2010	7:51:39 AM	BCl3 MFC set to  0.000000
9/15/2010	7:51:39 AM	PHl3 MFC set to  0.000000
9/15/2010	7:51:39 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:51:39 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:51:39 AM	Tube furnace set to 0
9/15/2010	7:52:39 AM	Helium valve closed
9/15/2010	7:52:39 AM	H2 valve closed
9/15/2010	7:52:39 AM	BCl3 valve closed
9/15/2010	7:52:39 AM	PH3 valve closed
9/15/2010	7:52:39 AM	SiCl4 pre valve closed
9/15/2010	7:52:39 AM	SiCl4 post valve closed
9/15/2010	7:52:39 AM	Bubbler valve closed
9/15/2010	7:52:39 AM	Main Vac valve opened
9/15/2010	7:52:39 AM	Bypass valve opened
9/15/2010	7:52:39 AM	Helium MFC set to  0.000000
9/15/2010	7:52:39 AM	H2 MFC set to  0.000000
9/15/2010	7:52:39 AM	BCl3 MFC set to  0.000000
9/15/2010	7:52:39 AM	PHl3 MFC set to  0.000000
9/15/2010	7:52:39 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:52:39 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:52:39 AM	Tube furnace set to 0
9/15/2010	7:53:39 AM	H2 valve closed
9/15/2010	7:53:39 AM	BCl3 valve closed
9/15/2010	7:53:39 AM	PH3 valve closed
9/15/2010	7:53:39 AM	SiCl4 pre valve closed
9/15/2010	7:53:39 AM	SiCl4 post valve closed
9/15/2010	7:53:39 AM	Bubbler valve closed
9/15/2010	7:53:39 AM	Helium valve opened
9/15/2010	7:53:39 AM	Main Vac valve opened
9/15/2010	7:53:39 AM	Bypass valve opened
9/15/2010	7:53:39 AM	Helium MFC set to  100.000000
9/15/2010	7:53:39 AM	H2 MFC set to  0.000000
9/15/2010	7:53:39 AM	BCl3 MFC set to  0.000000
9/15/2010	7:53:39 AM	PHl3 MFC set to  0.000000
9/15/2010	7:53:39 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:53:39 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:53:39 AM	Tube furnace set to 0
9/15/2010	7:54:39 AM	Helium valve closed
9/15/2010	7:54:39 AM	H2 valve closed
9/15/2010	7:54:39 AM	BCl3 valve closed
9/15/2010	7:54:39 AM	PH3 valve closed
9/15/2010	7:54:39 AM	SiCl4 pre valve closed
9/15/2010	7:54:39 AM	SiCl4 post valve closed
9/15/2010	7:54:39 AM	Bubbler valve closed
9/15/2010	7:54:39 AM	Main Vac valve opened
9/15/2010	7:54:39 AM	Bypass valve opened
9/15/2010	7:54:39 AM	Helium MFC set to  0.000000
9/15/2010	7:54:39 AM	H2 MFC set to  0.000000
9/15/2010	7:54:39 AM	BCl3 MFC set to  0.000000
9/15/2010	7:54:39 AM	PHl3 MFC set to  0.000000
9/15/2010	7:54:39 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:54:39 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:54:39 AM	Tube furnace set to 0
9/15/2010	7:55:39 AM	H2 valve closed
9/15/2010	7:55:39 AM	BCl3 valve closed
9/15/2010	7:55:39 AM	PH3 valve closed
9/15/2010	7:55:39 AM	SiCl4 pre valve closed
9/15/2010	7:55:39 AM	SiCl4 post valve closed
9/15/2010	7:55:39 AM	Bubbler valve closed
9/15/2010	7:55:39 AM	Helium valve opened
9/15/2010	7:55:39 AM	Main Vac valve opened
9/15/2010	7:55:39 AM	Bypass valve opened
9/15/2010	7:55:39 AM	Helium MFC set to  100.000000
9/15/2010	7:55:39 AM	H2 MFC set to  0.000000
9/15/2010	7:55:39 AM	BCl3 MFC set to  0.000000
9/15/2010	7:55:39 AM	PHl3 MFC set to  0.000000
9/15/2010	7:55:39 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:55:39 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:55:39 AM	Tube furnace set to 0
9/15/2010	7:56:40 AM	Helium valve closed
9/15/2010	7:56:40 AM	H2 valve closed
9/15/2010	7:56:40 AM	BCl3 valve closed
9/15/2010	7:56:40 AM	PH3 valve closed
9/15/2010	7:56:40 AM	SiCl4 pre valve closed
9/15/2010	7:56:40 AM	SiCl4 post valve closed
9/15/2010	7:56:40 AM	Bubbler valve closed
9/15/2010	7:56:40 AM	Main Vac valve opened
9/15/2010	7:56:40 AM	Bypass valve opened
9/15/2010	7:56:40 AM	Helium MFC set to  0.000000
9/15/2010	7:56:40 AM	H2 MFC set to  0.000000
9/15/2010	7:56:40 AM	BCl3 MFC set to  0.000000
9/15/2010	7:56:40 AM	PHl3 MFC set to  0.000000
9/15/2010	7:56:40 AM	SiCl4 MFC set to  0.000000
9/15/2010	7:56:40 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:56:40 AM	Tube furnace set to 0
9/15/2010	7:56:41 AM	Run finished at 7:56 AM
9/15/2010	7:56:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	8:01:38 AM	Recipe started at 8:01 AM
9/15/2010	8:01:38 AM	Helium valve closed
9/15/2010	8:01:38 AM	BCl3 valve closed
9/15/2010	8:01:38 AM	PH3 valve closed
9/15/2010	8:01:38 AM	SiCl4 pre valve closed
9/15/2010	8:01:38 AM	SiCl4 post valve closed
9/15/2010	8:01:38 AM	Main Vac valve closed
9/15/2010	8:01:38 AM	Bypass valve closed
9/15/2010	8:01:38 AM	Bubbler valve closed
9/15/2010	8:01:38 AM	H2 valve opened
9/15/2010	8:01:38 AM	Helium MFC set to  0.000000
9/15/2010	8:01:38 AM	H2 MFC set to  500.000000
9/15/2010	8:01:38 AM	BCl3 MFC set to  0.000000
9/15/2010	8:01:38 AM	PHl3 MFC set to  0.000000
9/15/2010	8:01:38 AM	SiCl4 MFC set to  0.000000
9/15/2010	8:01:38 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	8:01:38 AM	Tube furnace set to 1000
9/15/2010	8:02:59 AM	Helium valve closed
9/15/2010	8:02:59 AM	BCl3 valve closed
9/15/2010	8:02:59 AM	PH3 valve closed
9/15/2010	8:02:59 AM	SiCl4 pre valve closed
9/15/2010	8:02:59 AM	SiCl4 post valve closed
9/15/2010	8:02:59 AM	Main Vac valve closed
9/15/2010	8:02:59 AM	Bypass valve closed
9/15/2010	8:02:59 AM	H2 valve opened
9/15/2010	8:02:59 AM	Bubbler valve opened
9/15/2010	8:02:59 AM	Helium MFC set to  0.000000
9/15/2010	8:02:59 AM	H2 MFC set to  500.000000
9/15/2010	8:02:59 AM	BCl3 MFC set to  0.000000
9/15/2010	8:02:59 AM	PHl3 MFC set to  0.000000
9/15/2010	8:02:59 AM	SiCl4 MFC set to  0.000000
9/15/2010	8:02:59 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	8:02:59 AM	Tube furnace set to 1000
9/15/2010	8:22:59 AM	Helium valve closed
9/15/2010	8:22:59 AM	PH3 valve closed
9/15/2010	8:22:59 AM	Main Vac valve closed
9/15/2010	8:22:59 AM	Bypass valve closed
9/15/2010	8:22:59 AM	H2 valve opened
9/15/2010	8:22:59 AM	BCl3 valve opened
9/15/2010	8:22:59 AM	SiCl4 pre valve opened
9/15/2010	8:22:59 AM	SiCl4 post valve opened
9/15/2010	8:22:59 AM	Bubbler valve opened
9/15/2010	8:22:59 AM	Helium MFC set to  0.000000
9/15/2010	8:22:59 AM	H2 MFC set to  500.000000
9/15/2010	8:22:59 AM	BCl3 MFC set to  29.000000
9/15/2010	8:22:59 AM	PHl3 MFC set to  0.000000
9/15/2010	8:22:59 AM	SiCl4 MFC set to  50.000000
9/15/2010	8:22:59 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	8:22:59 AM	Tube furnace set to 1000
9/15/2010	8:34:59 AM	Helium valve closed
9/15/2010	8:34:59 AM	BCl3 valve closed
9/15/2010	8:34:59 AM	PH3 valve closed
9/15/2010	8:34:59 AM	SiCl4 pre valve closed
9/15/2010	8:34:59 AM	SiCl4 post valve closed
9/15/2010	8:34:59 AM	Main Vac valve closed
9/15/2010	8:34:59 AM	Bypass valve closed
9/15/2010	8:34:59 AM	H2 valve opened
9/15/2010	8:34:59 AM	Bubbler valve opened
9/15/2010	8:34:59 AM	Helium MFC set to  0.000000
9/15/2010	8:34:59 AM	H2 MFC set to  500.000000
9/15/2010	8:34:59 AM	BCl3 MFC set to  0.000000
9/15/2010	8:34:59 AM	PHl3 MFC set to  0.000000
9/15/2010	8:34:59 AM	SiCl4 MFC set to  0.000000
9/15/2010	8:34:59 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	8:35:00 AM	Tube furnace set to 750
9/15/2010	8:55:00 AM	H2 valve closed
9/15/2010	8:55:00 AM	BCl3 valve closed
9/15/2010	8:55:00 AM	PH3 valve closed
9/15/2010	8:55:00 AM	SiCl4 pre valve closed
9/15/2010	8:55:00 AM	SiCl4 post valve closed
9/15/2010	8:55:00 AM	Main Vac valve closed
9/15/2010	8:55:00 AM	Bypass valve closed
9/15/2010	8:55:00 AM	Helium valve opened
9/15/2010	8:55:00 AM	Bubbler valve opened
9/15/2010	8:55:00 AM	Helium MFC set to  500.000000
9/15/2010	8:55:00 AM	H2 MFC set to  0.000000
9/15/2010	8:55:00 AM	BCl3 MFC set to  0.000000
9/15/2010	8:55:00 AM	PHl3 MFC set to  0.000000
9/15/2010	8:55:00 AM	SiCl4 MFC set to  0.000000
9/15/2010	8:55:00 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	8:55:00 AM	Tube furnace set to 0
9/15/2010	9:07:12 AM	Helium valve closed
9/15/2010	9:07:12 AM	H2 valve closed
9/15/2010	9:07:12 AM	BCl3 valve closed
9/15/2010	9:07:12 AM	PH3 valve closed
9/15/2010	9:07:12 AM	SiCl4 pre valve closed
9/15/2010	9:07:12 AM	SiCl4 post valve closed
9/15/2010	9:07:12 AM	Main Vac valve closed
9/15/2010	9:07:12 AM	Bypass valve closed
9/15/2010	9:07:12 AM	Bubbler valve closed
9/15/2010	9:07:12 AM	Helium MFC set to  0.000000
9/15/2010	9:07:12 AM	H2 MFC set to  0.000000
9/15/2010	9:07:12 AM	BCl3 MFC set to  0.000000
9/15/2010	9:07:12 AM	PHl3 MFC set to  0.000000
9/15/2010	9:07:12 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:07:12 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:07:12 AM	Tube furnace set to 0
9/15/2010	9:07:13 AM	Run finished at 9:07 AM
9/15/2010	9:07:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	9:07:39 AM	Recipe started at 9:07 AM
9/15/2010	9:07:39 AM	H2 valve closed
9/15/2010	9:07:39 AM	BCl3 valve closed
9/15/2010	9:07:39 AM	PH3 valve closed
9/15/2010	9:07:39 AM	SiCl4 pre valve closed
9/15/2010	9:07:39 AM	SiCl4 post valve closed
9/15/2010	9:07:40 AM	Main Vac valve closed
9/15/2010	9:07:40 AM	Bypass valve closed
9/15/2010	9:07:40 AM	Bubbler valve closed
9/15/2010	9:07:40 AM	Helium valve opened
9/15/2010	9:07:40 AM	Helium MFC set to  500.000000
9/15/2010	9:07:40 AM	H2 MFC set to  0.000000
9/15/2010	9:07:40 AM	BCl3 MFC set to  0.000000
9/15/2010	9:07:40 AM	PHl3 MFC set to  0.000000
9/15/2010	9:07:40 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:07:40 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:07:40 AM	Tube furnace set to 0
9/15/2010	9:07:40 AM	Helium valve closed
9/15/2010	9:07:40 AM	H2 valve closed
9/15/2010	9:07:40 AM	BCl3 valve closed
9/15/2010	9:07:40 AM	PH3 valve closed
9/15/2010	9:07:40 AM	SiCl4 pre valve closed
9/15/2010	9:07:40 AM	SiCl4 post valve closed
9/15/2010	9:07:40 AM	Main Vac valve closed
9/15/2010	9:07:40 AM	Bypass valve closed
9/15/2010	9:07:40 AM	Bubbler valve closed
9/15/2010	9:07:40 AM	Helium MFC set to  0.000000
9/15/2010	9:07:40 AM	H2 MFC set to  0.000000
9/15/2010	9:07:40 AM	BCl3 MFC set to  0.000000
9/15/2010	9:07:40 AM	PHl3 MFC set to  0.000000
9/15/2010	9:07:40 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:07:40 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:07:40 AM	Tube furnace set to 0
9/15/2010	9:07:40 AM	Run finished at 9:07 AM
9/15/2010	9:07:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	9:18:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	9:18:37 AM	Recipe started at 9:18 AM
9/15/2010	9:18:37 AM	Helium valve closed
9/15/2010	9:18:37 AM	H2 valve closed
9/15/2010	9:18:37 AM	BCl3 valve closed
9/15/2010	9:18:37 AM	PH3 valve closed
9/15/2010	9:18:37 AM	SiCl4 pre valve closed
9/15/2010	9:18:37 AM	SiCl4 post valve closed
9/15/2010	9:18:37 AM	Main Vac valve closed
9/15/2010	9:18:37 AM	Bubbler valve closed
9/15/2010	9:18:37 AM	Bypass valve opened
9/15/2010	9:18:37 AM	Helium MFC set to  0.000000
9/15/2010	9:18:37 AM	H2 MFC set to  0.000000
9/15/2010	9:18:37 AM	BCl3 MFC set to  0.000000
9/15/2010	9:18:37 AM	PHl3 MFC set to  0.000000
9/15/2010	9:18:37 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:18:37 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:18:37 AM	Tube furnace set to 0
9/15/2010	9:19:18 AM	Helium valve closed
9/15/2010	9:19:18 AM	H2 valve closed
9/15/2010	9:19:18 AM	BCl3 valve closed
9/15/2010	9:19:18 AM	PH3 valve closed
9/15/2010	9:19:18 AM	SiCl4 pre valve closed
9/15/2010	9:19:18 AM	SiCl4 post valve closed
9/15/2010	9:19:18 AM	Bubbler valve closed
9/15/2010	9:19:18 AM	Main Vac valve opened
9/15/2010	9:19:18 AM	Bypass valve opened
9/15/2010	9:19:18 AM	Helium MFC set to  0.000000
9/15/2010	9:19:18 AM	H2 MFC set to  0.000000
9/15/2010	9:19:18 AM	BCl3 MFC set to  0.000000
9/15/2010	9:19:18 AM	PHl3 MFC set to  0.000000
9/15/2010	9:19:18 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:19:18 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:19:18 AM	Tube furnace set to 0
9/15/2010	9:19:18 AM	Run finished at 9:19 AM
9/15/2010	9:19:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	9:25:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	9:25:22 AM	Recipe started at 9:25 AM
9/15/2010	9:25:22 AM	Helium valve closed
9/15/2010	9:25:22 AM	H2 valve closed
9/15/2010	9:25:22 AM	BCl3 valve closed
9/15/2010	9:25:22 AM	PH3 valve closed
9/15/2010	9:25:22 AM	SiCl4 pre valve closed
9/15/2010	9:25:22 AM	SiCl4 post valve closed
9/15/2010	9:25:22 AM	Main Vac valve closed
9/15/2010	9:25:22 AM	Bubbler valve closed
9/15/2010	9:25:22 AM	Bypass valve opened
9/15/2010	9:25:22 AM	Helium MFC set to  0.000000
9/15/2010	9:25:22 AM	H2 MFC set to  0.000000
9/15/2010	9:25:22 AM	BCl3 MFC set to  0.000000
9/15/2010	9:25:22 AM	PHl3 MFC set to  0.000000
9/15/2010	9:25:22 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:25:22 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:25:23 AM	Tube furnace set to 0
9/15/2010	9:25:23 AM	Helium valve closed
9/15/2010	9:25:23 AM	H2 valve closed
9/15/2010	9:25:23 AM	BCl3 valve closed
9/15/2010	9:25:23 AM	PH3 valve closed
9/15/2010	9:25:23 AM	SiCl4 pre valve closed
9/15/2010	9:25:23 AM	SiCl4 post valve closed
9/15/2010	9:25:23 AM	Bubbler valve closed
9/15/2010	9:25:23 AM	Main Vac valve opened
9/15/2010	9:25:23 AM	Bypass valve opened
9/15/2010	9:25:23 AM	Helium MFC set to  0.000000
9/15/2010	9:25:23 AM	H2 MFC set to  0.000000
9/15/2010	9:25:23 AM	BCl3 MFC set to  0.000000
9/15/2010	9:25:23 AM	PHl3 MFC set to  0.000000
9/15/2010	9:25:23 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:25:23 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:25:23 AM	Tube furnace set to 0
9/15/2010	9:26:23 AM	H2 valve closed
9/15/2010	9:26:23 AM	BCl3 valve closed
9/15/2010	9:26:23 AM	PH3 valve closed
9/15/2010	9:26:23 AM	SiCl4 pre valve closed
9/15/2010	9:26:23 AM	SiCl4 post valve closed
9/15/2010	9:26:23 AM	Bubbler valve closed
9/15/2010	9:26:23 AM	Helium valve opened
9/15/2010	9:26:23 AM	Main Vac valve opened
9/15/2010	9:26:23 AM	Bypass valve opened
9/15/2010	9:26:23 AM	Helium MFC set to  100.000000
9/15/2010	9:26:23 AM	H2 MFC set to  0.000000
9/15/2010	9:26:23 AM	BCl3 MFC set to  0.000000
9/15/2010	9:26:23 AM	PHl3 MFC set to  0.000000
9/15/2010	9:26:23 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:26:23 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:26:23 AM	Tube furnace set to 0
9/15/2010	9:27:23 AM	Helium valve closed
9/15/2010	9:27:23 AM	H2 valve closed
9/15/2010	9:27:23 AM	BCl3 valve closed
9/15/2010	9:27:23 AM	PH3 valve closed
9/15/2010	9:27:23 AM	SiCl4 pre valve closed
9/15/2010	9:27:23 AM	SiCl4 post valve closed
9/15/2010	9:27:23 AM	Bubbler valve closed
9/15/2010	9:27:23 AM	Main Vac valve opened
9/15/2010	9:27:23 AM	Bypass valve opened
9/15/2010	9:27:23 AM	Helium MFC set to  0.000000
9/15/2010	9:27:23 AM	H2 MFC set to  0.000000
9/15/2010	9:27:23 AM	BCl3 MFC set to  0.000000
9/15/2010	9:27:23 AM	PHl3 MFC set to  0.000000
9/15/2010	9:27:23 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:27:23 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:27:23 AM	Tube furnace set to 0
9/15/2010	9:28:24 AM	H2 valve closed
9/15/2010	9:28:24 AM	BCl3 valve closed
9/15/2010	9:28:24 AM	PH3 valve closed
9/15/2010	9:28:24 AM	SiCl4 pre valve closed
9/15/2010	9:28:24 AM	SiCl4 post valve closed
9/15/2010	9:28:24 AM	Bubbler valve closed
9/15/2010	9:28:24 AM	Helium valve opened
9/15/2010	9:28:24 AM	Main Vac valve opened
9/15/2010	9:28:24 AM	Bypass valve opened
9/15/2010	9:28:24 AM	Helium MFC set to  100.000000
9/15/2010	9:28:24 AM	H2 MFC set to  0.000000
9/15/2010	9:28:24 AM	BCl3 MFC set to  0.000000
9/15/2010	9:28:24 AM	PHl3 MFC set to  0.000000
9/15/2010	9:28:24 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:28:24 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:28:24 AM	Tube furnace set to 0
9/15/2010	9:29:24 AM	Helium valve closed
9/15/2010	9:29:24 AM	H2 valve closed
9/15/2010	9:29:24 AM	BCl3 valve closed
9/15/2010	9:29:24 AM	PH3 valve closed
9/15/2010	9:29:24 AM	SiCl4 pre valve closed
9/15/2010	9:29:24 AM	SiCl4 post valve closed
9/15/2010	9:29:24 AM	Bubbler valve closed
9/15/2010	9:29:24 AM	Main Vac valve opened
9/15/2010	9:29:24 AM	Bypass valve opened
9/15/2010	9:29:24 AM	Helium MFC set to  0.000000
9/15/2010	9:29:24 AM	H2 MFC set to  0.000000
9/15/2010	9:29:24 AM	BCl3 MFC set to  0.000000
9/15/2010	9:29:24 AM	PHl3 MFC set to  0.000000
9/15/2010	9:29:24 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:29:24 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:29:24 AM	Tube furnace set to 0
9/15/2010	9:30:24 AM	H2 valve closed
9/15/2010	9:30:24 AM	BCl3 valve closed
9/15/2010	9:30:24 AM	PH3 valve closed
9/15/2010	9:30:24 AM	SiCl4 pre valve closed
9/15/2010	9:30:24 AM	SiCl4 post valve closed
9/15/2010	9:30:24 AM	Bubbler valve closed
9/15/2010	9:30:24 AM	Helium valve opened
9/15/2010	9:30:24 AM	Main Vac valve opened
9/15/2010	9:30:24 AM	Bypass valve opened
9/15/2010	9:30:24 AM	Helium MFC set to  100.000000
9/15/2010	9:30:24 AM	H2 MFC set to  0.000000
9/15/2010	9:30:24 AM	BCl3 MFC set to  0.000000
9/15/2010	9:30:24 AM	PHl3 MFC set to  0.000000
9/15/2010	9:30:24 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:30:24 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:30:24 AM	Tube furnace set to 0
9/15/2010	9:31:24 AM	Helium valve closed
9/15/2010	9:31:24 AM	H2 valve closed
9/15/2010	9:31:24 AM	BCl3 valve closed
9/15/2010	9:31:24 AM	PH3 valve closed
9/15/2010	9:31:24 AM	SiCl4 pre valve closed
9/15/2010	9:31:24 AM	SiCl4 post valve closed
9/15/2010	9:31:24 AM	Bubbler valve closed
9/15/2010	9:31:24 AM	Main Vac valve opened
9/15/2010	9:31:24 AM	Bypass valve opened
9/15/2010	9:31:24 AM	Helium MFC set to  0.000000
9/15/2010	9:31:24 AM	H2 MFC set to  0.000000
9/15/2010	9:31:24 AM	BCl3 MFC set to  0.000000
9/15/2010	9:31:24 AM	PHl3 MFC set to  0.000000
9/15/2010	9:31:24 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:31:24 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:31:24 AM	Tube furnace set to 0
9/15/2010	9:32:24 AM	H2 valve closed
9/15/2010	9:32:24 AM	BCl3 valve closed
9/15/2010	9:32:24 AM	PH3 valve closed
9/15/2010	9:32:24 AM	SiCl4 pre valve closed
9/15/2010	9:32:24 AM	SiCl4 post valve closed
9/15/2010	9:32:24 AM	Bubbler valve closed
9/15/2010	9:32:24 AM	Helium valve opened
9/15/2010	9:32:24 AM	Main Vac valve opened
9/15/2010	9:32:24 AM	Bypass valve opened
9/15/2010	9:32:24 AM	Helium MFC set to  100.000000
9/15/2010	9:32:24 AM	H2 MFC set to  0.000000
9/15/2010	9:32:24 AM	BCl3 MFC set to  0.000000
9/15/2010	9:32:24 AM	PHl3 MFC set to  0.000000
9/15/2010	9:32:24 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:32:24 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:32:25 AM	Tube furnace set to 0
9/15/2010	9:33:25 AM	Helium valve closed
9/15/2010	9:33:25 AM	H2 valve closed
9/15/2010	9:33:25 AM	BCl3 valve closed
9/15/2010	9:33:25 AM	PH3 valve closed
9/15/2010	9:33:25 AM	SiCl4 pre valve closed
9/15/2010	9:33:25 AM	SiCl4 post valve closed
9/15/2010	9:33:25 AM	Bubbler valve closed
9/15/2010	9:33:25 AM	Main Vac valve opened
9/15/2010	9:33:25 AM	Bypass valve opened
9/15/2010	9:33:25 AM	Helium MFC set to  0.000000
9/15/2010	9:33:25 AM	H2 MFC set to  0.000000
9/15/2010	9:33:25 AM	BCl3 MFC set to  0.000000
9/15/2010	9:33:25 AM	PHl3 MFC set to  0.000000
9/15/2010	9:33:25 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:33:25 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:33:25 AM	Tube furnace set to 0
9/15/2010	9:34:25 AM	H2 valve closed
9/15/2010	9:34:25 AM	BCl3 valve closed
9/15/2010	9:34:25 AM	PH3 valve closed
9/15/2010	9:34:25 AM	SiCl4 pre valve closed
9/15/2010	9:34:25 AM	SiCl4 post valve closed
9/15/2010	9:34:25 AM	Bubbler valve closed
9/15/2010	9:34:25 AM	Helium valve opened
9/15/2010	9:34:25 AM	Main Vac valve opened
9/15/2010	9:34:25 AM	Bypass valve opened
9/15/2010	9:34:25 AM	Helium MFC set to  100.000000
9/15/2010	9:34:25 AM	H2 MFC set to  0.000000
9/15/2010	9:34:25 AM	BCl3 MFC set to  0.000000
9/15/2010	9:34:25 AM	PHl3 MFC set to  0.000000
9/15/2010	9:34:25 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:34:25 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:34:25 AM	Tube furnace set to 0
9/15/2010	9:35:25 AM	Helium valve closed
9/15/2010	9:35:25 AM	H2 valve closed
9/15/2010	9:35:25 AM	BCl3 valve closed
9/15/2010	9:35:25 AM	PH3 valve closed
9/15/2010	9:35:25 AM	SiCl4 pre valve closed
9/15/2010	9:35:25 AM	SiCl4 post valve closed
9/15/2010	9:35:25 AM	Bubbler valve closed
9/15/2010	9:35:25 AM	Main Vac valve opened
9/15/2010	9:35:25 AM	Bypass valve opened
9/15/2010	9:35:25 AM	Helium MFC set to  0.000000
9/15/2010	9:35:25 AM	H2 MFC set to  0.000000
9/15/2010	9:35:25 AM	BCl3 MFC set to  0.000000
9/15/2010	9:35:25 AM	PHl3 MFC set to  0.000000
9/15/2010	9:35:25 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:35:25 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:35:25 AM	Tube furnace set to 0
9/15/2010	9:36:25 AM	H2 valve closed
9/15/2010	9:36:25 AM	BCl3 valve closed
9/15/2010	9:36:25 AM	PH3 valve closed
9/15/2010	9:36:25 AM	SiCl4 pre valve closed
9/15/2010	9:36:25 AM	SiCl4 post valve closed
9/15/2010	9:36:25 AM	Bubbler valve closed
9/15/2010	9:36:25 AM	Helium valve opened
9/15/2010	9:36:25 AM	Main Vac valve opened
9/15/2010	9:36:25 AM	Bypass valve opened
9/15/2010	9:36:25 AM	Helium MFC set to  100.000000
9/15/2010	9:36:25 AM	H2 MFC set to  0.000000
9/15/2010	9:36:25 AM	BCl3 MFC set to  0.000000
9/15/2010	9:36:25 AM	PHl3 MFC set to  0.000000
9/15/2010	9:36:25 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:36:25 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:36:25 AM	Tube furnace set to 0
9/15/2010	9:37:26 AM	Helium valve closed
9/15/2010	9:37:26 AM	H2 valve closed
9/15/2010	9:37:26 AM	BCl3 valve closed
9/15/2010	9:37:26 AM	PH3 valve closed
9/15/2010	9:37:26 AM	SiCl4 pre valve closed
9/15/2010	9:37:26 AM	SiCl4 post valve closed
9/15/2010	9:37:26 AM	Bubbler valve closed
9/15/2010	9:37:26 AM	Main Vac valve opened
9/15/2010	9:37:26 AM	Bypass valve opened
9/15/2010	9:37:26 AM	Helium MFC set to  0.000000
9/15/2010	9:37:26 AM	H2 MFC set to  0.000000
9/15/2010	9:37:26 AM	BCl3 MFC set to  0.000000
9/15/2010	9:37:26 AM	PHl3 MFC set to  0.000000
9/15/2010	9:37:26 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:37:26 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:37:26 AM	Tube furnace set to 0
9/15/2010	9:38:26 AM	H2 valve closed
9/15/2010	9:38:26 AM	BCl3 valve closed
9/15/2010	9:38:26 AM	PH3 valve closed
9/15/2010	9:38:26 AM	SiCl4 pre valve closed
9/15/2010	9:38:26 AM	SiCl4 post valve closed
9/15/2010	9:38:26 AM	Bubbler valve closed
9/15/2010	9:38:26 AM	Helium valve opened
9/15/2010	9:38:26 AM	Main Vac valve opened
9/15/2010	9:38:26 AM	Bypass valve opened
9/15/2010	9:38:26 AM	Helium MFC set to  100.000000
9/15/2010	9:38:26 AM	H2 MFC set to  0.000000
9/15/2010	9:38:26 AM	BCl3 MFC set to  0.000000
9/15/2010	9:38:26 AM	PHl3 MFC set to  0.000000
9/15/2010	9:38:26 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:38:26 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:38:26 AM	Tube furnace set to 0
9/15/2010	9:39:26 AM	Helium valve closed
9/15/2010	9:39:26 AM	H2 valve closed
9/15/2010	9:39:26 AM	BCl3 valve closed
9/15/2010	9:39:26 AM	PH3 valve closed
9/15/2010	9:39:26 AM	SiCl4 pre valve closed
9/15/2010	9:39:26 AM	SiCl4 post valve closed
9/15/2010	9:39:26 AM	Bubbler valve closed
9/15/2010	9:39:26 AM	Main Vac valve opened
9/15/2010	9:39:26 AM	Bypass valve opened
9/15/2010	9:39:26 AM	Helium MFC set to  0.000000
9/15/2010	9:39:26 AM	H2 MFC set to  0.000000
9/15/2010	9:39:26 AM	BCl3 MFC set to  0.000000
9/15/2010	9:39:26 AM	PHl3 MFC set to  0.000000
9/15/2010	9:39:26 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:39:26 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:39:26 AM	Tube furnace set to 0
9/15/2010	9:40:00 AM	Run aborted at 9:40 AM
9/15/2010	9:40:00 AM	Helium valve closed
9/15/2010	9:40:00 AM	H2 valve closed
9/15/2010	9:40:00 AM	BCl3 valve closed
9/15/2010	9:40:00 AM	PH3 valve closed
9/15/2010	9:40:00 AM	SiCl4 pre valve closed
9/15/2010	9:40:00 AM	SiCl4 post valve closed
9/15/2010	9:40:00 AM	Bypass valve closed
9/15/2010	9:40:00 AM	Main Vac valve closed
9/15/2010	9:40:00 AM	Bubbler valve closed
9/15/2010	9:40:00 AM	Helium MFC set to  0.000000
9/15/2010	9:40:00 AM	H2 MFC set to  0.000000
9/15/2010	9:40:00 AM	BCl3 MFC set to  0.000000
9/15/2010	9:40:00 AM	PHl3 MFC set to  0.000000
9/15/2010	9:40:00 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:40:01 AM	Tube furnace set to 0
9/15/2010	9:40:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	9:40:08 AM	Helium MFC set to  250.000000
9/15/2010	9:40:09 AM	Helium valve opened
9/15/2010	9:40:15 AM	Main Vac valve opened
9/15/2010	9:40:16 AM	Bypass valve opened
9/15/2010	9:42:15 AM	Helium valve closed
9/15/2010	9:42:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	9:42:17 AM	Recipe started at 9:42 AM
9/15/2010	9:42:17 AM	Helium valve closed
9/15/2010	9:42:17 AM	H2 valve closed
9/15/2010	9:42:17 AM	BCl3 valve closed
9/15/2010	9:42:17 AM	PH3 valve closed
9/15/2010	9:42:17 AM	SiCl4 pre valve closed
9/15/2010	9:42:17 AM	SiCl4 post valve closed
9/15/2010	9:42:17 AM	Main Vac valve closed
9/15/2010	9:42:17 AM	Bubbler valve closed
9/15/2010	9:42:17 AM	Bypass valve opened
9/15/2010	9:42:17 AM	Helium MFC set to  0.000000
9/15/2010	9:42:17 AM	H2 MFC set to  0.000000
9/15/2010	9:42:17 AM	BCl3 MFC set to  0.000000
9/15/2010	9:42:17 AM	PHl3 MFC set to  0.000000
9/15/2010	9:42:17 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:42:17 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:42:17 AM	Tube furnace set to 0
9/15/2010	9:42:18 AM	Helium valve closed
9/15/2010	9:42:18 AM	H2 valve closed
9/15/2010	9:42:18 AM	BCl3 valve closed
9/15/2010	9:42:18 AM	PH3 valve closed
9/15/2010	9:42:18 AM	SiCl4 pre valve closed
9/15/2010	9:42:18 AM	SiCl4 post valve closed
9/15/2010	9:42:18 AM	Bubbler valve closed
9/15/2010	9:42:18 AM	Main Vac valve opened
9/15/2010	9:42:18 AM	Bypass valve opened
9/15/2010	9:42:18 AM	Helium MFC set to  0.000000
9/15/2010	9:42:18 AM	H2 MFC set to  0.000000
9/15/2010	9:42:18 AM	BCl3 MFC set to  0.000000
9/15/2010	9:42:18 AM	PHl3 MFC set to  0.000000
9/15/2010	9:42:18 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:42:18 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:42:18 AM	Tube furnace set to 0
9/15/2010	9:42:18 AM	Run finished at 9:42 AM
9/15/2010	9:42:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	9:43:05 AM	Recipe started at 9:43 AM
9/15/2010	9:43:05 AM	Helium valve closed
9/15/2010	9:43:05 AM	BCl3 valve closed
9/15/2010	9:43:05 AM	PH3 valve closed
9/15/2010	9:43:05 AM	SiCl4 pre valve closed
9/15/2010	9:43:05 AM	SiCl4 post valve closed
9/15/2010	9:43:05 AM	Main Vac valve closed
9/15/2010	9:43:05 AM	Bypass valve closed
9/15/2010	9:43:05 AM	Bubbler valve closed
9/15/2010	9:43:05 AM	H2 valve opened
9/15/2010	9:43:05 AM	Helium MFC set to  0.000000
9/15/2010	9:43:05 AM	H2 MFC set to  500.000000
9/15/2010	9:43:05 AM	BCl3 MFC set to  0.000000
9/15/2010	9:43:05 AM	PHl3 MFC set to  0.000000
9/15/2010	9:43:05 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:43:05 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:43:05 AM	Tube furnace set to 1000
9/15/2010	9:44:23 AM	Helium valve closed
9/15/2010	9:44:23 AM	BCl3 valve closed
9/15/2010	9:44:23 AM	PH3 valve closed
9/15/2010	9:44:23 AM	SiCl4 pre valve closed
9/15/2010	9:44:23 AM	SiCl4 post valve closed
9/15/2010	9:44:23 AM	Main Vac valve closed
9/15/2010	9:44:23 AM	Bypass valve closed
9/15/2010	9:44:23 AM	H2 valve opened
9/15/2010	9:44:23 AM	Bubbler valve opened
9/15/2010	9:44:23 AM	Helium MFC set to  0.000000
9/15/2010	9:44:23 AM	H2 MFC set to  500.000000
9/15/2010	9:44:23 AM	BCl3 MFC set to  0.000000
9/15/2010	9:44:23 AM	PHl3 MFC set to  0.000000
9/15/2010	9:44:23 AM	SiCl4 MFC set to  0.000000
9/15/2010	9:44:23 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	9:44:23 AM	Tube furnace set to 1000
9/15/2010	10:04:23 AM	Helium valve closed
9/15/2010	10:04:23 AM	PH3 valve closed
9/15/2010	10:04:23 AM	Main Vac valve closed
9/15/2010	10:04:23 AM	Bypass valve closed
9/15/2010	10:04:23 AM	H2 valve opened
9/15/2010	10:04:23 AM	BCl3 valve opened
9/15/2010	10:04:23 AM	SiCl4 pre valve opened
9/15/2010	10:04:23 AM	SiCl4 post valve opened
9/15/2010	10:04:23 AM	Bubbler valve opened
9/15/2010	10:04:23 AM	Helium MFC set to  0.000000
9/15/2010	10:04:23 AM	H2 MFC set to  500.000000
9/15/2010	10:04:23 AM	BCl3 MFC set to  29.000000
9/15/2010	10:04:23 AM	PHl3 MFC set to  0.000000
9/15/2010	10:04:23 AM	SiCl4 MFC set to  50.000000
9/15/2010	10:04:23 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	10:04:23 AM	Tube furnace set to 1000
9/15/2010	10:16:23 AM	Helium valve closed
9/15/2010	10:16:23 AM	BCl3 valve closed
9/15/2010	10:16:23 AM	PH3 valve closed
9/15/2010	10:16:23 AM	SiCl4 pre valve closed
9/15/2010	10:16:23 AM	SiCl4 post valve closed
9/15/2010	10:16:23 AM	Main Vac valve closed
9/15/2010	10:16:23 AM	Bypass valve closed
9/15/2010	10:16:23 AM	H2 valve opened
9/15/2010	10:16:23 AM	Bubbler valve opened
9/15/2010	10:16:23 AM	Helium MFC set to  0.000000
9/15/2010	10:16:23 AM	H2 MFC set to  500.000000
9/15/2010	10:16:23 AM	BCl3 MFC set to  0.000000
9/15/2010	10:16:23 AM	PHl3 MFC set to  0.000000
9/15/2010	10:16:23 AM	SiCl4 MFC set to  0.000000
9/15/2010	10:16:23 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	10:16:24 AM	Tube furnace set to 750
9/15/2010	10:36:24 AM	H2 valve closed
9/15/2010	10:36:24 AM	BCl3 valve closed
9/15/2010	10:36:24 AM	PH3 valve closed
9/15/2010	10:36:24 AM	SiCl4 pre valve closed
9/15/2010	10:36:24 AM	SiCl4 post valve closed
9/15/2010	10:36:24 AM	Main Vac valve closed
9/15/2010	10:36:24 AM	Bypass valve closed
9/15/2010	10:36:24 AM	Helium valve opened
9/15/2010	10:36:24 AM	Bubbler valve opened
9/15/2010	10:36:24 AM	Helium MFC set to  500.000000
9/15/2010	10:36:24 AM	H2 MFC set to  0.000000
9/15/2010	10:36:24 AM	BCl3 MFC set to  0.000000
9/15/2010	10:36:24 AM	PHl3 MFC set to  0.000000
9/15/2010	10:36:24 AM	SiCl4 MFC set to  0.000000
9/15/2010	10:36:24 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	10:36:24 AM	Tube furnace set to 0
9/15/2010	10:56:22 AM	Run aborted at 10:56 AM
9/15/2010	10:56:22 AM	Helium valve closed
9/15/2010	10:56:22 AM	H2 valve closed
9/15/2010	10:56:22 AM	BCl3 valve closed
9/15/2010	10:56:22 AM	PH3 valve closed
9/15/2010	10:56:22 AM	SiCl4 pre valve closed
9/15/2010	10:56:22 AM	SiCl4 post valve closed
9/15/2010	10:56:22 AM	Bypass valve closed
9/15/2010	10:56:22 AM	Main Vac valve closed
9/15/2010	10:56:22 AM	Bubbler valve closed
9/15/2010	10:56:22 AM	Helium MFC set to  0.000000
9/15/2010	10:56:22 AM	H2 MFC set to  0.000000
9/15/2010	10:56:22 AM	BCl3 MFC set to  0.000000
9/15/2010	10:56:22 AM	PHl3 MFC set to  0.000000
9/15/2010	10:56:22 AM	SiCl4 MFC set to  0.000000
9/15/2010	10:56:22 AM	Tube furnace set to 0
9/15/2010	10:56:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	10:56:23 AM	Recipe started at 10:56 AM
9/15/2010	10:56:24 AM	H2 valve closed
9/15/2010	10:56:24 AM	BCl3 valve closed
9/15/2010	10:56:24 AM	PH3 valve closed
9/15/2010	10:56:24 AM	SiCl4 pre valve closed
9/15/2010	10:56:24 AM	SiCl4 post valve closed
9/15/2010	10:56:24 AM	Main Vac valve closed
9/15/2010	10:56:24 AM	Bypass valve closed
9/15/2010	10:56:24 AM	Bubbler valve closed
9/15/2010	10:56:24 AM	Helium valve opened
9/15/2010	10:56:24 AM	Helium MFC set to  500.000000
9/15/2010	10:56:24 AM	H2 MFC set to  0.000000
9/15/2010	10:56:24 AM	BCl3 MFC set to  0.000000
9/15/2010	10:56:24 AM	PHl3 MFC set to  0.000000
9/15/2010	10:56:24 AM	SiCl4 MFC set to  0.000000
9/15/2010	10:56:24 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	10:56:24 AM	Tube furnace set to 0
9/15/2010	10:56:24 AM	Helium valve closed
9/15/2010	10:56:24 AM	H2 valve closed
9/15/2010	10:56:24 AM	BCl3 valve closed
9/15/2010	10:56:24 AM	PH3 valve closed
9/15/2010	10:56:24 AM	SiCl4 pre valve closed
9/15/2010	10:56:24 AM	SiCl4 post valve closed
9/15/2010	10:56:24 AM	Main Vac valve closed
9/15/2010	10:56:24 AM	Bypass valve closed
9/15/2010	10:56:24 AM	Bubbler valve closed
9/15/2010	10:56:24 AM	Helium MFC set to  0.000000
9/15/2010	10:56:24 AM	H2 MFC set to  0.000000
9/15/2010	10:56:24 AM	BCl3 MFC set to  0.000000
9/15/2010	10:56:24 AM	PHl3 MFC set to  0.000000
9/15/2010	10:56:24 AM	SiCl4 MFC set to  0.000000
9/15/2010	10:56:24 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	10:56:24 AM	Tube furnace set to 0
9/15/2010	10:56:24 AM	Run finished at 10:56 AM
9/15/2010	10:56:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	11:11:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	11:11:36 AM	Recipe started at 11:11 AM
9/15/2010	11:11:36 AM	Helium valve closed
9/15/2010	11:11:36 AM	H2 valve closed
9/15/2010	11:11:36 AM	BCl3 valve closed
9/15/2010	11:11:36 AM	PH3 valve closed
9/15/2010	11:11:36 AM	SiCl4 pre valve closed
9/15/2010	11:11:36 AM	SiCl4 post valve closed
9/15/2010	11:11:36 AM	Main Vac valve closed
9/15/2010	11:11:36 AM	Bubbler valve closed
9/15/2010	11:11:36 AM	Bypass valve opened
9/15/2010	11:11:36 AM	Helium MFC set to  0.000000
9/15/2010	11:11:36 AM	H2 MFC set to  0.000000
9/15/2010	11:11:36 AM	BCl3 MFC set to  0.000000
9/15/2010	11:11:36 AM	PHl3 MFC set to  0.000000
9/15/2010	11:11:36 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:11:36 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:11:36 AM	Tube furnace set to 0
9/15/2010	11:12:18 AM	Helium valve closed
9/15/2010	11:12:18 AM	H2 valve closed
9/15/2010	11:12:18 AM	BCl3 valve closed
9/15/2010	11:12:18 AM	PH3 valve closed
9/15/2010	11:12:18 AM	SiCl4 pre valve closed
9/15/2010	11:12:18 AM	SiCl4 post valve closed
9/15/2010	11:12:18 AM	Bubbler valve closed
9/15/2010	11:12:18 AM	Main Vac valve opened
9/15/2010	11:12:18 AM	Bypass valve opened
9/15/2010	11:12:18 AM	Helium MFC set to  0.000000
9/15/2010	11:12:18 AM	H2 MFC set to  0.000000
9/15/2010	11:12:18 AM	BCl3 MFC set to  0.000000
9/15/2010	11:12:18 AM	PHl3 MFC set to  0.000000
9/15/2010	11:12:18 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:12:18 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:12:18 AM	Tube furnace set to 0
9/15/2010	11:12:18 AM	Run finished at 11:12 AM
9/15/2010	11:12:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	11:12:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	11:12:38 AM	Recipe started at 11:12 AM
9/15/2010	11:12:38 AM	Helium valve closed
9/15/2010	11:12:38 AM	H2 valve closed
9/15/2010	11:12:38 AM	BCl3 valve closed
9/15/2010	11:12:38 AM	PH3 valve closed
9/15/2010	11:12:38 AM	SiCl4 pre valve closed
9/15/2010	11:12:38 AM	SiCl4 post valve closed
9/15/2010	11:12:38 AM	Main Vac valve closed
9/15/2010	11:12:38 AM	Bubbler valve closed
9/15/2010	11:12:38 AM	Bypass valve opened
9/15/2010	11:12:38 AM	Helium MFC set to  0.000000
9/15/2010	11:12:38 AM	H2 MFC set to  0.000000
9/15/2010	11:12:38 AM	BCl3 MFC set to  0.000000
9/15/2010	11:12:38 AM	PHl3 MFC set to  0.000000
9/15/2010	11:12:38 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:12:38 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:12:38 AM	Tube furnace set to 0
9/15/2010	11:12:38 AM	Helium valve closed
9/15/2010	11:12:38 AM	H2 valve closed
9/15/2010	11:12:38 AM	BCl3 valve closed
9/15/2010	11:12:38 AM	PH3 valve closed
9/15/2010	11:12:38 AM	SiCl4 pre valve closed
9/15/2010	11:12:38 AM	SiCl4 post valve closed
9/15/2010	11:12:38 AM	Bubbler valve closed
9/15/2010	11:12:38 AM	Main Vac valve opened
9/15/2010	11:12:38 AM	Bypass valve opened
9/15/2010	11:12:38 AM	Helium MFC set to  0.000000
9/15/2010	11:12:38 AM	H2 MFC set to  0.000000
9/15/2010	11:12:38 AM	BCl3 MFC set to  0.000000
9/15/2010	11:12:38 AM	PHl3 MFC set to  0.000000
9/15/2010	11:12:38 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:12:38 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:12:38 AM	Tube furnace set to 0
9/15/2010	11:13:39 AM	H2 valve closed
9/15/2010	11:13:39 AM	BCl3 valve closed
9/15/2010	11:13:39 AM	PH3 valve closed
9/15/2010	11:13:39 AM	SiCl4 pre valve closed
9/15/2010	11:13:39 AM	SiCl4 post valve closed
9/15/2010	11:13:39 AM	Bubbler valve closed
9/15/2010	11:13:39 AM	Helium valve opened
9/15/2010	11:13:39 AM	Main Vac valve opened
9/15/2010	11:13:39 AM	Bypass valve opened
9/15/2010	11:13:39 AM	Helium MFC set to  100.000000
9/15/2010	11:13:39 AM	H2 MFC set to  0.000000
9/15/2010	11:13:39 AM	BCl3 MFC set to  0.000000
9/15/2010	11:13:39 AM	PHl3 MFC set to  0.000000
9/15/2010	11:13:39 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:13:39 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:13:39 AM	Tube furnace set to 0
9/15/2010	11:14:39 AM	Helium valve closed
9/15/2010	11:14:39 AM	H2 valve closed
9/15/2010	11:14:39 AM	BCl3 valve closed
9/15/2010	11:14:39 AM	PH3 valve closed
9/15/2010	11:14:39 AM	SiCl4 pre valve closed
9/15/2010	11:14:39 AM	SiCl4 post valve closed
9/15/2010	11:14:39 AM	Bubbler valve closed
9/15/2010	11:14:39 AM	Main Vac valve opened
9/15/2010	11:14:39 AM	Bypass valve opened
9/15/2010	11:14:39 AM	Helium MFC set to  0.000000
9/15/2010	11:14:39 AM	H2 MFC set to  0.000000
9/15/2010	11:14:39 AM	BCl3 MFC set to  0.000000
9/15/2010	11:14:39 AM	PHl3 MFC set to  0.000000
9/15/2010	11:14:39 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:14:39 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:14:39 AM	Tube furnace set to 0
9/15/2010	11:15:39 AM	H2 valve closed
9/15/2010	11:15:39 AM	BCl3 valve closed
9/15/2010	11:15:39 AM	PH3 valve closed
9/15/2010	11:15:39 AM	SiCl4 pre valve closed
9/15/2010	11:15:39 AM	SiCl4 post valve closed
9/15/2010	11:15:39 AM	Bubbler valve closed
9/15/2010	11:15:39 AM	Helium valve opened
9/15/2010	11:15:39 AM	Main Vac valve opened
9/15/2010	11:15:39 AM	Bypass valve opened
9/15/2010	11:15:39 AM	Helium MFC set to  100.000000
9/15/2010	11:15:39 AM	H2 MFC set to  0.000000
9/15/2010	11:15:39 AM	BCl3 MFC set to  0.000000
9/15/2010	11:15:39 AM	PHl3 MFC set to  0.000000
9/15/2010	11:15:39 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:15:39 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:15:39 AM	Tube furnace set to 0
9/15/2010	11:16:39 AM	Helium valve closed
9/15/2010	11:16:39 AM	H2 valve closed
9/15/2010	11:16:39 AM	BCl3 valve closed
9/15/2010	11:16:39 AM	PH3 valve closed
9/15/2010	11:16:39 AM	SiCl4 pre valve closed
9/15/2010	11:16:39 AM	SiCl4 post valve closed
9/15/2010	11:16:39 AM	Bubbler valve closed
9/15/2010	11:16:39 AM	Main Vac valve opened
9/15/2010	11:16:39 AM	Bypass valve opened
9/15/2010	11:16:39 AM	Helium MFC set to  0.000000
9/15/2010	11:16:39 AM	H2 MFC set to  0.000000
9/15/2010	11:16:39 AM	BCl3 MFC set to  0.000000
9/15/2010	11:16:39 AM	PHl3 MFC set to  0.000000
9/15/2010	11:16:39 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:16:39 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:16:39 AM	Tube furnace set to 0
9/15/2010	11:17:39 AM	H2 valve closed
9/15/2010	11:17:39 AM	BCl3 valve closed
9/15/2010	11:17:39 AM	PH3 valve closed
9/15/2010	11:17:39 AM	SiCl4 pre valve closed
9/15/2010	11:17:39 AM	SiCl4 post valve closed
9/15/2010	11:17:39 AM	Bubbler valve closed
9/15/2010	11:17:39 AM	Helium valve opened
9/15/2010	11:17:39 AM	Main Vac valve opened
9/15/2010	11:17:39 AM	Bypass valve opened
9/15/2010	11:17:39 AM	Helium MFC set to  100.000000
9/15/2010	11:17:39 AM	H2 MFC set to  0.000000
9/15/2010	11:17:39 AM	BCl3 MFC set to  0.000000
9/15/2010	11:17:39 AM	PHl3 MFC set to  0.000000
9/15/2010	11:17:39 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:17:39 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:17:40 AM	Tube furnace set to 0
9/15/2010	11:18:40 AM	Helium valve closed
9/15/2010	11:18:40 AM	H2 valve closed
9/15/2010	11:18:40 AM	BCl3 valve closed
9/15/2010	11:18:40 AM	PH3 valve closed
9/15/2010	11:18:40 AM	SiCl4 pre valve closed
9/15/2010	11:18:40 AM	SiCl4 post valve closed
9/15/2010	11:18:40 AM	Bubbler valve closed
9/15/2010	11:18:40 AM	Main Vac valve opened
9/15/2010	11:18:40 AM	Bypass valve opened
9/15/2010	11:18:40 AM	Helium MFC set to  0.000000
9/15/2010	11:18:40 AM	H2 MFC set to  0.000000
9/15/2010	11:18:40 AM	BCl3 MFC set to  0.000000
9/15/2010	11:18:40 AM	PHl3 MFC set to  0.000000
9/15/2010	11:18:40 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:18:40 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:18:40 AM	Tube furnace set to 0
9/15/2010	11:19:40 AM	H2 valve closed
9/15/2010	11:19:40 AM	BCl3 valve closed
9/15/2010	11:19:40 AM	PH3 valve closed
9/15/2010	11:19:40 AM	SiCl4 pre valve closed
9/15/2010	11:19:40 AM	SiCl4 post valve closed
9/15/2010	11:19:40 AM	Bubbler valve closed
9/15/2010	11:19:40 AM	Helium valve opened
9/15/2010	11:19:40 AM	Main Vac valve opened
9/15/2010	11:19:40 AM	Bypass valve opened
9/15/2010	11:19:40 AM	Helium MFC set to  100.000000
9/15/2010	11:19:40 AM	H2 MFC set to  0.000000
9/15/2010	11:19:40 AM	BCl3 MFC set to  0.000000
9/15/2010	11:19:40 AM	PHl3 MFC set to  0.000000
9/15/2010	11:19:40 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:19:40 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:19:40 AM	Tube furnace set to 0
9/15/2010	11:20:40 AM	Helium valve closed
9/15/2010	11:20:40 AM	H2 valve closed
9/15/2010	11:20:40 AM	BCl3 valve closed
9/15/2010	11:20:40 AM	PH3 valve closed
9/15/2010	11:20:40 AM	SiCl4 pre valve closed
9/15/2010	11:20:40 AM	SiCl4 post valve closed
9/15/2010	11:20:40 AM	Bubbler valve closed
9/15/2010	11:20:40 AM	Main Vac valve opened
9/15/2010	11:20:40 AM	Bypass valve opened
9/15/2010	11:20:40 AM	Helium MFC set to  0.000000
9/15/2010	11:20:40 AM	H2 MFC set to  0.000000
9/15/2010	11:20:40 AM	BCl3 MFC set to  0.000000
9/15/2010	11:20:40 AM	PHl3 MFC set to  0.000000
9/15/2010	11:20:40 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:20:40 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:20:40 AM	Tube furnace set to 0
9/15/2010	11:21:40 AM	H2 valve closed
9/15/2010	11:21:40 AM	BCl3 valve closed
9/15/2010	11:21:40 AM	PH3 valve closed
9/15/2010	11:21:40 AM	SiCl4 pre valve closed
9/15/2010	11:21:40 AM	SiCl4 post valve closed
9/15/2010	11:21:40 AM	Bubbler valve closed
9/15/2010	11:21:40 AM	Helium valve opened
9/15/2010	11:21:40 AM	Main Vac valve opened
9/15/2010	11:21:40 AM	Bypass valve opened
9/15/2010	11:21:40 AM	Helium MFC set to  100.000000
9/15/2010	11:21:40 AM	H2 MFC set to  0.000000
9/15/2010	11:21:40 AM	BCl3 MFC set to  0.000000
9/15/2010	11:21:40 AM	PHl3 MFC set to  0.000000
9/15/2010	11:21:40 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:21:40 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:21:40 AM	Tube furnace set to 0
9/15/2010	11:22:40 AM	Helium valve closed
9/15/2010	11:22:40 AM	H2 valve closed
9/15/2010	11:22:40 AM	BCl3 valve closed
9/15/2010	11:22:40 AM	PH3 valve closed
9/15/2010	11:22:40 AM	SiCl4 pre valve closed
9/15/2010	11:22:40 AM	SiCl4 post valve closed
9/15/2010	11:22:40 AM	Bubbler valve closed
9/15/2010	11:22:40 AM	Main Vac valve opened
9/15/2010	11:22:40 AM	Bypass valve opened
9/15/2010	11:22:40 AM	Helium MFC set to  0.000000
9/15/2010	11:22:40 AM	H2 MFC set to  0.000000
9/15/2010	11:22:40 AM	BCl3 MFC set to  0.000000
9/15/2010	11:22:40 AM	PHl3 MFC set to  0.000000
9/15/2010	11:22:40 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:22:40 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:22:41 AM	Tube furnace set to 0
9/15/2010	11:23:41 AM	H2 valve closed
9/15/2010	11:23:41 AM	BCl3 valve closed
9/15/2010	11:23:41 AM	PH3 valve closed
9/15/2010	11:23:41 AM	SiCl4 pre valve closed
9/15/2010	11:23:41 AM	SiCl4 post valve closed
9/15/2010	11:23:41 AM	Bubbler valve closed
9/15/2010	11:23:41 AM	Helium valve opened
9/15/2010	11:23:41 AM	Main Vac valve opened
9/15/2010	11:23:41 AM	Bypass valve opened
9/15/2010	11:23:41 AM	Helium MFC set to  100.000000
9/15/2010	11:23:41 AM	H2 MFC set to  0.000000
9/15/2010	11:23:41 AM	BCl3 MFC set to  0.000000
9/15/2010	11:23:41 AM	PHl3 MFC set to  0.000000
9/15/2010	11:23:41 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:23:41 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:23:41 AM	Tube furnace set to 0
9/15/2010	11:24:41 AM	Helium valve closed
9/15/2010	11:24:41 AM	H2 valve closed
9/15/2010	11:24:41 AM	BCl3 valve closed
9/15/2010	11:24:41 AM	PH3 valve closed
9/15/2010	11:24:41 AM	SiCl4 pre valve closed
9/15/2010	11:24:41 AM	SiCl4 post valve closed
9/15/2010	11:24:41 AM	Bubbler valve closed
9/15/2010	11:24:41 AM	Main Vac valve opened
9/15/2010	11:24:41 AM	Bypass valve opened
9/15/2010	11:24:41 AM	Helium MFC set to  0.000000
9/15/2010	11:24:41 AM	H2 MFC set to  0.000000
9/15/2010	11:24:41 AM	BCl3 MFC set to  0.000000
9/15/2010	11:24:41 AM	PHl3 MFC set to  0.000000
9/15/2010	11:24:41 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:24:41 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:24:41 AM	Tube furnace set to 0
9/15/2010	11:25:41 AM	H2 valve closed
9/15/2010	11:25:41 AM	BCl3 valve closed
9/15/2010	11:25:41 AM	PH3 valve closed
9/15/2010	11:25:41 AM	SiCl4 pre valve closed
9/15/2010	11:25:41 AM	SiCl4 post valve closed
9/15/2010	11:25:41 AM	Bubbler valve closed
9/15/2010	11:25:41 AM	Helium valve opened
9/15/2010	11:25:41 AM	Main Vac valve opened
9/15/2010	11:25:41 AM	Bypass valve opened
9/15/2010	11:25:41 AM	Helium MFC set to  100.000000
9/15/2010	11:25:41 AM	H2 MFC set to  0.000000
9/15/2010	11:25:41 AM	BCl3 MFC set to  0.000000
9/15/2010	11:25:41 AM	PHl3 MFC set to  0.000000
9/15/2010	11:25:41 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:25:41 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:25:41 AM	Tube furnace set to 0
9/15/2010	11:26:41 AM	Helium valve closed
9/15/2010	11:26:41 AM	H2 valve closed
9/15/2010	11:26:41 AM	BCl3 valve closed
9/15/2010	11:26:41 AM	PH3 valve closed
9/15/2010	11:26:41 AM	SiCl4 pre valve closed
9/15/2010	11:26:41 AM	SiCl4 post valve closed
9/15/2010	11:26:41 AM	Bubbler valve closed
9/15/2010	11:26:41 AM	Main Vac valve opened
9/15/2010	11:26:41 AM	Bypass valve opened
9/15/2010	11:26:41 AM	Helium MFC set to  0.000000
9/15/2010	11:26:41 AM	H2 MFC set to  0.000000
9/15/2010	11:26:41 AM	BCl3 MFC set to  0.000000
9/15/2010	11:26:41 AM	PHl3 MFC set to  0.000000
9/15/2010	11:26:41 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:26:41 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:26:41 AM	Tube furnace set to 0
9/15/2010	11:27:41 AM	H2 valve closed
9/15/2010	11:27:41 AM	BCl3 valve closed
9/15/2010	11:27:41 AM	PH3 valve closed
9/15/2010	11:27:41 AM	SiCl4 pre valve closed
9/15/2010	11:27:42 AM	SiCl4 post valve closed
9/15/2010	11:27:42 AM	Bubbler valve closed
9/15/2010	11:27:42 AM	Helium valve opened
9/15/2010	11:27:42 AM	Main Vac valve opened
9/15/2010	11:27:42 AM	Bypass valve opened
9/15/2010	11:27:42 AM	Helium MFC set to  100.000000
9/15/2010	11:27:42 AM	H2 MFC set to  0.000000
9/15/2010	11:27:42 AM	BCl3 MFC set to  0.000000
9/15/2010	11:27:42 AM	PHl3 MFC set to  0.000000
9/15/2010	11:27:42 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:27:42 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:27:42 AM	Tube furnace set to 0
9/15/2010	11:28:42 AM	Helium valve closed
9/15/2010	11:28:42 AM	H2 valve closed
9/15/2010	11:28:42 AM	BCl3 valve closed
9/15/2010	11:28:42 AM	PH3 valve closed
9/15/2010	11:28:42 AM	SiCl4 pre valve closed
9/15/2010	11:28:42 AM	SiCl4 post valve closed
9/15/2010	11:28:42 AM	Bubbler valve closed
9/15/2010	11:28:42 AM	Main Vac valve opened
9/15/2010	11:28:42 AM	Bypass valve opened
9/15/2010	11:28:42 AM	Helium MFC set to  0.000000
9/15/2010	11:28:42 AM	H2 MFC set to  0.000000
9/15/2010	11:28:42 AM	BCl3 MFC set to  0.000000
9/15/2010	11:28:42 AM	PHl3 MFC set to  0.000000
9/15/2010	11:28:42 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:28:42 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:28:42 AM	Tube furnace set to 0
9/15/2010	11:29:42 AM	H2 valve closed
9/15/2010	11:29:42 AM	BCl3 valve closed
9/15/2010	11:29:42 AM	PH3 valve closed
9/15/2010	11:29:42 AM	SiCl4 pre valve closed
9/15/2010	11:29:42 AM	SiCl4 post valve closed
9/15/2010	11:29:42 AM	Bubbler valve closed
9/15/2010	11:29:42 AM	Helium valve opened
9/15/2010	11:29:42 AM	Main Vac valve opened
9/15/2010	11:29:42 AM	Bypass valve opened
9/15/2010	11:29:42 AM	Helium MFC set to  100.000000
9/15/2010	11:29:42 AM	H2 MFC set to  0.000000
9/15/2010	11:29:42 AM	BCl3 MFC set to  0.000000
9/15/2010	11:29:42 AM	PHl3 MFC set to  0.000000
9/15/2010	11:29:42 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:29:42 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:29:42 AM	Tube furnace set to 0
9/15/2010	11:30:42 AM	Helium valve closed
9/15/2010	11:30:42 AM	H2 valve closed
9/15/2010	11:30:42 AM	BCl3 valve closed
9/15/2010	11:30:42 AM	PH3 valve closed
9/15/2010	11:30:42 AM	SiCl4 pre valve closed
9/15/2010	11:30:42 AM	SiCl4 post valve closed
9/15/2010	11:30:42 AM	Bubbler valve closed
9/15/2010	11:30:42 AM	Main Vac valve opened
9/15/2010	11:30:42 AM	Bypass valve opened
9/15/2010	11:30:42 AM	Helium MFC set to  0.000000
9/15/2010	11:30:42 AM	H2 MFC set to  0.000000
9/15/2010	11:30:42 AM	BCl3 MFC set to  0.000000
9/15/2010	11:30:42 AM	PHl3 MFC set to  0.000000
9/15/2010	11:30:42 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:30:42 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:30:42 AM	Tube furnace set to 0
9/15/2010	11:31:42 AM	H2 valve closed
9/15/2010	11:31:42 AM	BCl3 valve closed
9/15/2010	11:31:42 AM	PH3 valve closed
9/15/2010	11:31:42 AM	SiCl4 pre valve closed
9/15/2010	11:31:42 AM	SiCl4 post valve closed
9/15/2010	11:31:42 AM	Bubbler valve closed
9/15/2010	11:31:42 AM	Helium valve opened
9/15/2010	11:31:42 AM	Main Vac valve opened
9/15/2010	11:31:42 AM	Bypass valve opened
9/15/2010	11:31:42 AM	Helium MFC set to  100.000000
9/15/2010	11:31:42 AM	H2 MFC set to  0.000000
9/15/2010	11:31:42 AM	BCl3 MFC set to  0.000000
9/15/2010	11:31:42 AM	PHl3 MFC set to  0.000000
9/15/2010	11:31:42 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:31:42 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:31:42 AM	Tube furnace set to 0
9/15/2010	11:32:42 AM	Helium valve closed
9/15/2010	11:32:42 AM	H2 valve closed
9/15/2010	11:32:42 AM	BCl3 valve closed
9/15/2010	11:32:42 AM	PH3 valve closed
9/15/2010	11:32:42 AM	SiCl4 pre valve closed
9/15/2010	11:32:42 AM	SiCl4 post valve closed
9/15/2010	11:32:42 AM	Bubbler valve closed
9/15/2010	11:32:42 AM	Main Vac valve opened
9/15/2010	11:32:42 AM	Bypass valve opened
9/15/2010	11:32:42 AM	Helium MFC set to  0.000000
9/15/2010	11:32:42 AM	H2 MFC set to  0.000000
9/15/2010	11:32:42 AM	BCl3 MFC set to  0.000000
9/15/2010	11:32:42 AM	PHl3 MFC set to  0.000000
9/15/2010	11:32:42 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:32:42 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:32:43 AM	Tube furnace set to 0
9/15/2010	11:32:44 AM	Run finished at 11:32 AM
9/15/2010	11:32:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	11:52:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	11:52:23 AM	Recipe started at 11:52 AM
9/15/2010	11:52:23 AM	Helium valve closed
9/15/2010	11:52:23 AM	H2 valve closed
9/15/2010	11:52:23 AM	BCl3 valve closed
9/15/2010	11:52:23 AM	PH3 valve closed
9/15/2010	11:52:23 AM	SiCl4 pre valve closed
9/15/2010	11:52:23 AM	SiCl4 post valve closed
9/15/2010	11:52:23 AM	Main Vac valve closed
9/15/2010	11:52:23 AM	Bubbler valve closed
9/15/2010	11:52:23 AM	Bypass valve opened
9/15/2010	11:52:23 AM	Helium MFC set to  0.000000
9/15/2010	11:52:23 AM	H2 MFC set to  0.000000
9/15/2010	11:52:23 AM	BCl3 MFC set to  0.000000
9/15/2010	11:52:23 AM	PHl3 MFC set to  0.000000
9/15/2010	11:52:23 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:52:23 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:52:23 AM	Tube furnace set to 0
9/15/2010	11:52:23 AM	Helium valve closed
9/15/2010	11:52:23 AM	H2 valve closed
9/15/2010	11:52:23 AM	BCl3 valve closed
9/15/2010	11:52:23 AM	PH3 valve closed
9/15/2010	11:52:23 AM	SiCl4 pre valve closed
9/15/2010	11:52:23 AM	SiCl4 post valve closed
9/15/2010	11:52:23 AM	Bubbler valve closed
9/15/2010	11:52:23 AM	Main Vac valve opened
9/15/2010	11:52:23 AM	Bypass valve opened
9/15/2010	11:52:23 AM	Helium MFC set to  0.000000
9/15/2010	11:52:23 AM	H2 MFC set to  0.000000
9/15/2010	11:52:23 AM	BCl3 MFC set to  0.000000
9/15/2010	11:52:23 AM	PHl3 MFC set to  0.000000
9/15/2010	11:52:23 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:52:23 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:52:23 AM	Tube furnace set to 0
9/15/2010	11:52:23 AM	Run finished at 11:52 AM
9/15/2010	11:52:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	11:52:32 AM	Helium valve opened
9/15/2010	11:52:36 AM	Helium MFC set to  100.000000
9/15/2010	11:56:03 AM	Helium MFC set to  250.000000
9/15/2010	11:57:58 AM	Helium valve closed
9/15/2010	11:58:01 AM	Helium MFC set to  0.000000
9/15/2010	11:58:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	11:58:03 AM	Recipe started at 11:58 AM
9/15/2010	11:58:03 AM	Helium valve closed
9/15/2010	11:58:03 AM	H2 valve closed
9/15/2010	11:58:03 AM	BCl3 valve closed
9/15/2010	11:58:03 AM	PH3 valve closed
9/15/2010	11:58:03 AM	SiCl4 pre valve closed
9/15/2010	11:58:03 AM	SiCl4 post valve closed
9/15/2010	11:58:03 AM	Main Vac valve closed
9/15/2010	11:58:03 AM	Bubbler valve closed
9/15/2010	11:58:03 AM	Bypass valve opened
9/15/2010	11:58:03 AM	Helium MFC set to  0.000000
9/15/2010	11:58:03 AM	H2 MFC set to  0.000000
9/15/2010	11:58:03 AM	BCl3 MFC set to  0.000000
9/15/2010	11:58:03 AM	PHl3 MFC set to  0.000000
9/15/2010	11:58:03 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:58:03 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:58:03 AM	Tube furnace set to 0
9/15/2010	11:58:03 AM	Helium valve closed
9/15/2010	11:58:03 AM	H2 valve closed
9/15/2010	11:58:03 AM	BCl3 valve closed
9/15/2010	11:58:03 AM	PH3 valve closed
9/15/2010	11:58:03 AM	SiCl4 pre valve closed
9/15/2010	11:58:03 AM	SiCl4 post valve closed
9/15/2010	11:58:03 AM	Bubbler valve closed
9/15/2010	11:58:03 AM	Main Vac valve opened
9/15/2010	11:58:03 AM	Bypass valve opened
9/15/2010	11:58:03 AM	Helium MFC set to  0.000000
9/15/2010	11:58:03 AM	H2 MFC set to  0.000000
9/15/2010	11:58:03 AM	BCl3 MFC set to  0.000000
9/15/2010	11:58:03 AM	PHl3 MFC set to  0.000000
9/15/2010	11:58:03 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:58:03 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:58:03 AM	Tube furnace set to 0
9/15/2010	11:58:04 AM	Run finished at 11:58 AM
9/15/2010	11:58:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	11:58:43 AM	Recipe started at 11:58 AM
9/15/2010	11:58:43 AM	Helium valve closed
9/15/2010	11:58:43 AM	BCl3 valve closed
9/15/2010	11:58:43 AM	PH3 valve closed
9/15/2010	11:58:43 AM	SiCl4 pre valve closed
9/15/2010	11:58:43 AM	SiCl4 post valve closed
9/15/2010	11:58:43 AM	Main Vac valve closed
9/15/2010	11:58:43 AM	Bypass valve closed
9/15/2010	11:58:43 AM	Bubbler valve closed
9/15/2010	11:58:43 AM	H2 valve opened
9/15/2010	11:58:43 AM	Helium MFC set to  0.000000
9/15/2010	11:58:43 AM	H2 MFC set to  500.000000
9/15/2010	11:58:43 AM	BCl3 MFC set to  0.000000
9/15/2010	11:58:43 AM	PHl3 MFC set to  0.000000
9/15/2010	11:58:43 AM	SiCl4 MFC set to  0.000000
9/15/2010	11:58:43 AM	Bypass solenoid MFC set to  0.000000
9/15/2010	11:58:43 AM	Tube furnace set to 1000
9/15/2010	12:00:02 PM	Helium valve closed
9/15/2010	12:00:02 PM	BCl3 valve closed
9/15/2010	12:00:02 PM	PH3 valve closed
9/15/2010	12:00:02 PM	SiCl4 pre valve closed
9/15/2010	12:00:02 PM	SiCl4 post valve closed
9/15/2010	12:00:02 PM	Main Vac valve closed
9/15/2010	12:00:02 PM	Bypass valve closed
9/15/2010	12:00:02 PM	H2 valve opened
9/15/2010	12:00:02 PM	Bubbler valve opened
9/15/2010	12:00:02 PM	Helium MFC set to  0.000000
9/15/2010	12:00:02 PM	H2 MFC set to  500.000000
9/15/2010	12:00:02 PM	BCl3 MFC set to  0.000000
9/15/2010	12:00:02 PM	PHl3 MFC set to  0.000000
9/15/2010	12:00:02 PM	SiCl4 MFC set to  0.000000
9/15/2010	12:00:02 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	12:00:02 PM	Tube furnace set to 1000
9/15/2010	12:20:02 PM	Helium valve closed
9/15/2010	12:20:02 PM	PH3 valve closed
9/15/2010	12:20:02 PM	Main Vac valve closed
9/15/2010	12:20:02 PM	Bypass valve closed
9/15/2010	12:20:02 PM	H2 valve opened
9/15/2010	12:20:02 PM	BCl3 valve opened
9/15/2010	12:20:02 PM	SiCl4 pre valve opened
9/15/2010	12:20:02 PM	SiCl4 post valve opened
9/15/2010	12:20:02 PM	Bubbler valve opened
9/15/2010	12:20:02 PM	Helium MFC set to  0.000000
9/15/2010	12:20:02 PM	H2 MFC set to  500.000000
9/15/2010	12:20:02 PM	BCl3 MFC set to  29.000000
9/15/2010	12:20:02 PM	PHl3 MFC set to  0.000000
9/15/2010	12:20:02 PM	SiCl4 MFC set to  50.000000
9/15/2010	12:20:02 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	12:20:02 PM	Tube furnace set to 1000
9/15/2010	12:32:02 PM	Helium valve closed
9/15/2010	12:32:02 PM	BCl3 valve closed
9/15/2010	12:32:02 PM	PH3 valve closed
9/15/2010	12:32:02 PM	SiCl4 pre valve closed
9/15/2010	12:32:02 PM	SiCl4 post valve closed
9/15/2010	12:32:02 PM	Main Vac valve closed
9/15/2010	12:32:02 PM	Bypass valve closed
9/15/2010	12:32:02 PM	H2 valve opened
9/15/2010	12:32:02 PM	Bubbler valve opened
9/15/2010	12:32:02 PM	Helium MFC set to  0.000000
9/15/2010	12:32:02 PM	H2 MFC set to  500.000000
9/15/2010	12:32:02 PM	BCl3 MFC set to  0.000000
9/15/2010	12:32:02 PM	PHl3 MFC set to  0.000000
9/15/2010	12:32:02 PM	SiCl4 MFC set to  0.000000
9/15/2010	12:32:02 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	12:32:02 PM	Tube furnace set to 750
9/15/2010	12:52:03 PM	H2 valve closed
9/15/2010	12:52:03 PM	BCl3 valve closed
9/15/2010	12:52:03 PM	PH3 valve closed
9/15/2010	12:52:03 PM	SiCl4 pre valve closed
9/15/2010	12:52:03 PM	SiCl4 post valve closed
9/15/2010	12:52:03 PM	Main Vac valve closed
9/15/2010	12:52:03 PM	Bypass valve closed
9/15/2010	12:52:03 PM	Helium valve opened
9/15/2010	12:52:03 PM	Bubbler valve opened
9/15/2010	12:52:03 PM	Helium MFC set to  500.000000
9/15/2010	12:52:03 PM	H2 MFC set to  0.000000
9/15/2010	12:52:03 PM	BCl3 MFC set to  0.000000
9/15/2010	12:52:03 PM	PHl3 MFC set to  0.000000
9/15/2010	12:52:03 PM	SiCl4 MFC set to  0.000000
9/15/2010	12:52:03 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	12:52:03 PM	Tube furnace set to 0
9/15/2010	1:12:03 PM	Helium valve closed
9/15/2010	1:12:03 PM	H2 valve closed
9/15/2010	1:12:03 PM	BCl3 valve closed
9/15/2010	1:12:03 PM	PH3 valve closed
9/15/2010	1:12:03 PM	SiCl4 pre valve closed
9/15/2010	1:12:03 PM	SiCl4 post valve closed
9/15/2010	1:12:03 PM	Main Vac valve closed
9/15/2010	1:12:03 PM	Bypass valve closed
9/15/2010	1:12:03 PM	Bubbler valve closed
9/15/2010	1:12:03 PM	Helium MFC set to  0.000000
9/15/2010	1:12:03 PM	H2 MFC set to  0.000000
9/15/2010	1:12:03 PM	BCl3 MFC set to  0.000000
9/15/2010	1:12:03 PM	PHl3 MFC set to  0.000000
9/15/2010	1:12:03 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:12:03 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:12:03 PM	Tube furnace set to 0
9/15/2010	1:12:03 PM	Run finished at 1:12 PM
9/15/2010	1:18:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	1:18:04 PM	Recipe started at 1:18 PM
9/15/2010	1:18:04 PM	H2 valve closed
9/15/2010	1:18:04 PM	BCl3 valve closed
9/15/2010	1:18:04 PM	PH3 valve closed
9/15/2010	1:18:04 PM	SiCl4 pre valve closed
9/15/2010	1:18:04 PM	SiCl4 post valve closed
9/15/2010	1:18:04 PM	Main Vac valve closed
9/15/2010	1:18:04 PM	Bypass valve closed
9/15/2010	1:18:04 PM	Bubbler valve closed
9/15/2010	1:18:04 PM	Helium valve opened
9/15/2010	1:18:04 PM	Helium MFC set to  500.000000
9/15/2010	1:18:04 PM	H2 MFC set to  0.000000
9/15/2010	1:18:04 PM	BCl3 MFC set to  0.000000
9/15/2010	1:18:04 PM	PHl3 MFC set to  0.000000
9/15/2010	1:18:04 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:18:04 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:18:04 PM	Tube furnace set to 0
9/15/2010	1:18:06 PM	Helium valve closed
9/15/2010	1:18:06 PM	H2 valve closed
9/15/2010	1:18:06 PM	BCl3 valve closed
9/15/2010	1:18:06 PM	PH3 valve closed
9/15/2010	1:18:06 PM	SiCl4 pre valve closed
9/15/2010	1:18:06 PM	SiCl4 post valve closed
9/15/2010	1:18:06 PM	Main Vac valve closed
9/15/2010	1:18:06 PM	Bypass valve closed
9/15/2010	1:18:06 PM	Bubbler valve closed
9/15/2010	1:18:06 PM	Helium MFC set to  0.000000
9/15/2010	1:18:06 PM	H2 MFC set to  0.000000
9/15/2010	1:18:06 PM	BCl3 MFC set to  0.000000
9/15/2010	1:18:06 PM	PHl3 MFC set to  0.000000
9/15/2010	1:18:06 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:18:06 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:18:06 PM	Tube furnace set to 0
9/15/2010	1:18:06 PM	Run finished at 1:18 PM
9/15/2010	1:18:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	1:47:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	1:47:24 PM	Recipe started at 1:47 PM
9/15/2010	1:47:24 PM	Helium valve closed
9/15/2010	1:47:24 PM	H2 valve closed
9/15/2010	1:47:24 PM	BCl3 valve closed
9/15/2010	1:47:24 PM	PH3 valve closed
9/15/2010	1:47:24 PM	SiCl4 pre valve closed
9/15/2010	1:47:24 PM	SiCl4 post valve closed
9/15/2010	1:47:24 PM	Main Vac valve closed
9/15/2010	1:47:24 PM	Bubbler valve closed
9/15/2010	1:47:24 PM	Bypass valve opened
9/15/2010	1:47:24 PM	Helium MFC set to  0.000000
9/15/2010	1:47:24 PM	H2 MFC set to  0.000000
9/15/2010	1:47:24 PM	BCl3 MFC set to  0.000000
9/15/2010	1:47:24 PM	PHl3 MFC set to  0.000000
9/15/2010	1:47:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:47:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:47:25 PM	Tube furnace set to 0
9/15/2010	1:48:07 PM	Helium valve closed
9/15/2010	1:48:07 PM	H2 valve closed
9/15/2010	1:48:07 PM	BCl3 valve closed
9/15/2010	1:48:07 PM	PH3 valve closed
9/15/2010	1:48:07 PM	SiCl4 pre valve closed
9/15/2010	1:48:07 PM	SiCl4 post valve closed
9/15/2010	1:48:07 PM	Bubbler valve closed
9/15/2010	1:48:07 PM	Main Vac valve opened
9/15/2010	1:48:07 PM	Bypass valve opened
9/15/2010	1:48:07 PM	Helium MFC set to  0.000000
9/15/2010	1:48:07 PM	H2 MFC set to  0.000000
9/15/2010	1:48:07 PM	BCl3 MFC set to  0.000000
9/15/2010	1:48:07 PM	PHl3 MFC set to  0.000000
9/15/2010	1:48:07 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:48:07 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:48:07 PM	Tube furnace set to 0
9/15/2010	1:48:07 PM	Run finished at 1:48 PM
9/15/2010	1:48:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	1:48:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	1:48:22 PM	Recipe started at 1:48 PM
9/15/2010	1:48:23 PM	Helium valve closed
9/15/2010	1:48:23 PM	H2 valve closed
9/15/2010	1:48:23 PM	BCl3 valve closed
9/15/2010	1:48:23 PM	PH3 valve closed
9/15/2010	1:48:23 PM	SiCl4 pre valve closed
9/15/2010	1:48:23 PM	SiCl4 post valve closed
9/15/2010	1:48:23 PM	Main Vac valve closed
9/15/2010	1:48:23 PM	Bubbler valve closed
9/15/2010	1:48:23 PM	Bypass valve opened
9/15/2010	1:48:23 PM	Helium MFC set to  0.000000
9/15/2010	1:48:23 PM	H2 MFC set to  0.000000
9/15/2010	1:48:23 PM	BCl3 MFC set to  0.000000
9/15/2010	1:48:23 PM	PHl3 MFC set to  0.000000
9/15/2010	1:48:23 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:48:23 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:48:23 PM	Tube furnace set to 0
9/15/2010	1:48:23 PM	Helium valve closed
9/15/2010	1:48:23 PM	H2 valve closed
9/15/2010	1:48:23 PM	BCl3 valve closed
9/15/2010	1:48:23 PM	PH3 valve closed
9/15/2010	1:48:23 PM	SiCl4 pre valve closed
9/15/2010	1:48:23 PM	SiCl4 post valve closed
9/15/2010	1:48:23 PM	Bubbler valve closed
9/15/2010	1:48:23 PM	Main Vac valve opened
9/15/2010	1:48:23 PM	Bypass valve opened
9/15/2010	1:48:23 PM	Helium MFC set to  0.000000
9/15/2010	1:48:23 PM	H2 MFC set to  0.000000
9/15/2010	1:48:23 PM	BCl3 MFC set to  0.000000
9/15/2010	1:48:23 PM	PHl3 MFC set to  0.000000
9/15/2010	1:48:23 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:48:23 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:48:23 PM	Tube furnace set to 0
9/15/2010	1:49:23 PM	H2 valve closed
9/15/2010	1:49:23 PM	BCl3 valve closed
9/15/2010	1:49:23 PM	PH3 valve closed
9/15/2010	1:49:23 PM	SiCl4 pre valve closed
9/15/2010	1:49:23 PM	SiCl4 post valve closed
9/15/2010	1:49:23 PM	Bubbler valve closed
9/15/2010	1:49:23 PM	Helium valve opened
9/15/2010	1:49:23 PM	Main Vac valve opened
9/15/2010	1:49:23 PM	Bypass valve opened
9/15/2010	1:49:23 PM	Helium MFC set to  100.000000
9/15/2010	1:49:23 PM	H2 MFC set to  0.000000
9/15/2010	1:49:23 PM	BCl3 MFC set to  0.000000
9/15/2010	1:49:23 PM	PHl3 MFC set to  0.000000
9/15/2010	1:49:23 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:49:23 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:49:23 PM	Tube furnace set to 0
9/15/2010	1:50:23 PM	Helium valve closed
9/15/2010	1:50:23 PM	H2 valve closed
9/15/2010	1:50:23 PM	BCl3 valve closed
9/15/2010	1:50:23 PM	PH3 valve closed
9/15/2010	1:50:23 PM	SiCl4 pre valve closed
9/15/2010	1:50:23 PM	SiCl4 post valve closed
9/15/2010	1:50:23 PM	Bubbler valve closed
9/15/2010	1:50:23 PM	Main Vac valve opened
9/15/2010	1:50:23 PM	Bypass valve opened
9/15/2010	1:50:23 PM	Helium MFC set to  0.000000
9/15/2010	1:50:23 PM	H2 MFC set to  0.000000
9/15/2010	1:50:23 PM	BCl3 MFC set to  0.000000
9/15/2010	1:50:23 PM	PHl3 MFC set to  0.000000
9/15/2010	1:50:23 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:50:23 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:50:24 PM	Tube furnace set to 0
9/15/2010	1:51:24 PM	H2 valve closed
9/15/2010	1:51:24 PM	BCl3 valve closed
9/15/2010	1:51:24 PM	PH3 valve closed
9/15/2010	1:51:24 PM	SiCl4 pre valve closed
9/15/2010	1:51:24 PM	SiCl4 post valve closed
9/15/2010	1:51:24 PM	Bubbler valve closed
9/15/2010	1:51:24 PM	Helium valve opened
9/15/2010	1:51:24 PM	Main Vac valve opened
9/15/2010	1:51:24 PM	Bypass valve opened
9/15/2010	1:51:24 PM	Helium MFC set to  100.000000
9/15/2010	1:51:24 PM	H2 MFC set to  0.000000
9/15/2010	1:51:24 PM	BCl3 MFC set to  0.000000
9/15/2010	1:51:24 PM	PHl3 MFC set to  0.000000
9/15/2010	1:51:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:51:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:51:24 PM	Tube furnace set to 0
9/15/2010	1:52:24 PM	Helium valve closed
9/15/2010	1:52:24 PM	H2 valve closed
9/15/2010	1:52:24 PM	BCl3 valve closed
9/15/2010	1:52:24 PM	PH3 valve closed
9/15/2010	1:52:24 PM	SiCl4 pre valve closed
9/15/2010	1:52:24 PM	SiCl4 post valve closed
9/15/2010	1:52:24 PM	Bubbler valve closed
9/15/2010	1:52:24 PM	Main Vac valve opened
9/15/2010	1:52:24 PM	Bypass valve opened
9/15/2010	1:52:24 PM	Helium MFC set to  0.000000
9/15/2010	1:52:24 PM	H2 MFC set to  0.000000
9/15/2010	1:52:24 PM	BCl3 MFC set to  0.000000
9/15/2010	1:52:24 PM	PHl3 MFC set to  0.000000
9/15/2010	1:52:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:52:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:52:24 PM	Tube furnace set to 0
9/15/2010	1:53:24 PM	H2 valve closed
9/15/2010	1:53:24 PM	BCl3 valve closed
9/15/2010	1:53:24 PM	PH3 valve closed
9/15/2010	1:53:24 PM	SiCl4 pre valve closed
9/15/2010	1:53:24 PM	SiCl4 post valve closed
9/15/2010	1:53:24 PM	Bubbler valve closed
9/15/2010	1:53:24 PM	Helium valve opened
9/15/2010	1:53:24 PM	Main Vac valve opened
9/15/2010	1:53:24 PM	Bypass valve opened
9/15/2010	1:53:24 PM	Helium MFC set to  100.000000
9/15/2010	1:53:24 PM	H2 MFC set to  0.000000
9/15/2010	1:53:24 PM	BCl3 MFC set to  0.000000
9/15/2010	1:53:24 PM	PHl3 MFC set to  0.000000
9/15/2010	1:53:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:53:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:53:24 PM	Tube furnace set to 0
9/15/2010	1:54:24 PM	Helium valve closed
9/15/2010	1:54:24 PM	H2 valve closed
9/15/2010	1:54:24 PM	BCl3 valve closed
9/15/2010	1:54:24 PM	PH3 valve closed
9/15/2010	1:54:24 PM	SiCl4 pre valve closed
9/15/2010	1:54:24 PM	SiCl4 post valve closed
9/15/2010	1:54:24 PM	Bubbler valve closed
9/15/2010	1:54:24 PM	Main Vac valve opened
9/15/2010	1:54:24 PM	Bypass valve opened
9/15/2010	1:54:24 PM	Helium MFC set to  0.000000
9/15/2010	1:54:24 PM	H2 MFC set to  0.000000
9/15/2010	1:54:24 PM	BCl3 MFC set to  0.000000
9/15/2010	1:54:24 PM	PHl3 MFC set to  0.000000
9/15/2010	1:54:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:54:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:54:24 PM	Tube furnace set to 0
9/15/2010	1:55:24 PM	H2 valve closed
9/15/2010	1:55:24 PM	BCl3 valve closed
9/15/2010	1:55:24 PM	PH3 valve closed
9/15/2010	1:55:24 PM	SiCl4 pre valve closed
9/15/2010	1:55:24 PM	SiCl4 post valve closed
9/15/2010	1:55:24 PM	Bubbler valve closed
9/15/2010	1:55:24 PM	Helium valve opened
9/15/2010	1:55:24 PM	Main Vac valve opened
9/15/2010	1:55:24 PM	Bypass valve opened
9/15/2010	1:55:24 PM	Helium MFC set to  100.000000
9/15/2010	1:55:24 PM	H2 MFC set to  0.000000
9/15/2010	1:55:24 PM	BCl3 MFC set to  0.000000
9/15/2010	1:55:24 PM	PHl3 MFC set to  0.000000
9/15/2010	1:55:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:55:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:55:25 PM	Tube furnace set to 0
9/15/2010	1:56:25 PM	Helium valve closed
9/15/2010	1:56:25 PM	H2 valve closed
9/15/2010	1:56:25 PM	BCl3 valve closed
9/15/2010	1:56:25 PM	PH3 valve closed
9/15/2010	1:56:25 PM	SiCl4 pre valve closed
9/15/2010	1:56:25 PM	SiCl4 post valve closed
9/15/2010	1:56:25 PM	Bubbler valve closed
9/15/2010	1:56:25 PM	Main Vac valve opened
9/15/2010	1:56:25 PM	Bypass valve opened
9/15/2010	1:56:25 PM	Helium MFC set to  0.000000
9/15/2010	1:56:25 PM	H2 MFC set to  0.000000
9/15/2010	1:56:25 PM	BCl3 MFC set to  0.000000
9/15/2010	1:56:25 PM	PHl3 MFC set to  0.000000
9/15/2010	1:56:25 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:56:25 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:56:25 PM	Tube furnace set to 0
9/15/2010	1:57:25 PM	H2 valve closed
9/15/2010	1:57:25 PM	BCl3 valve closed
9/15/2010	1:57:25 PM	PH3 valve closed
9/15/2010	1:57:25 PM	SiCl4 pre valve closed
9/15/2010	1:57:25 PM	SiCl4 post valve closed
9/15/2010	1:57:25 PM	Bubbler valve closed
9/15/2010	1:57:25 PM	Helium valve opened
9/15/2010	1:57:25 PM	Main Vac valve opened
9/15/2010	1:57:25 PM	Bypass valve opened
9/15/2010	1:57:25 PM	Helium MFC set to  100.000000
9/15/2010	1:57:25 PM	H2 MFC set to  0.000000
9/15/2010	1:57:25 PM	BCl3 MFC set to  0.000000
9/15/2010	1:57:25 PM	PHl3 MFC set to  0.000000
9/15/2010	1:57:25 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:57:25 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:57:25 PM	Tube furnace set to 0
9/15/2010	1:58:25 PM	Helium valve closed
9/15/2010	1:58:25 PM	H2 valve closed
9/15/2010	1:58:25 PM	BCl3 valve closed
9/15/2010	1:58:25 PM	PH3 valve closed
9/15/2010	1:58:25 PM	SiCl4 pre valve closed
9/15/2010	1:58:25 PM	SiCl4 post valve closed
9/15/2010	1:58:25 PM	Bubbler valve closed
9/15/2010	1:58:25 PM	Main Vac valve opened
9/15/2010	1:58:25 PM	Bypass valve opened
9/15/2010	1:58:25 PM	Helium MFC set to  0.000000
9/15/2010	1:58:25 PM	H2 MFC set to  0.000000
9/15/2010	1:58:25 PM	BCl3 MFC set to  0.000000
9/15/2010	1:58:25 PM	PHl3 MFC set to  0.000000
9/15/2010	1:58:25 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:58:25 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:58:25 PM	Tube furnace set to 0
9/15/2010	1:59:25 PM	H2 valve closed
9/15/2010	1:59:25 PM	BCl3 valve closed
9/15/2010	1:59:25 PM	PH3 valve closed
9/15/2010	1:59:25 PM	SiCl4 pre valve closed
9/15/2010	1:59:25 PM	SiCl4 post valve closed
9/15/2010	1:59:25 PM	Bubbler valve closed
9/15/2010	1:59:25 PM	Helium valve opened
9/15/2010	1:59:25 PM	Main Vac valve opened
9/15/2010	1:59:25 PM	Bypass valve opened
9/15/2010	1:59:25 PM	Helium MFC set to  100.000000
9/15/2010	1:59:25 PM	H2 MFC set to  0.000000
9/15/2010	1:59:25 PM	BCl3 MFC set to  0.000000
9/15/2010	1:59:25 PM	PHl3 MFC set to  0.000000
9/15/2010	1:59:25 PM	SiCl4 MFC set to  0.000000
9/15/2010	1:59:25 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	1:59:25 PM	Tube furnace set to 0
9/15/2010	2:00:25 PM	Helium valve closed
9/15/2010	2:00:25 PM	H2 valve closed
9/15/2010	2:00:25 PM	BCl3 valve closed
9/15/2010	2:00:25 PM	PH3 valve closed
9/15/2010	2:00:25 PM	SiCl4 pre valve closed
9/15/2010	2:00:25 PM	SiCl4 post valve closed
9/15/2010	2:00:25 PM	Bubbler valve closed
9/15/2010	2:00:25 PM	Main Vac valve opened
9/15/2010	2:00:25 PM	Bypass valve opened
9/15/2010	2:00:25 PM	Helium MFC set to  0.000000
9/15/2010	2:00:25 PM	H2 MFC set to  0.000000
9/15/2010	2:00:25 PM	BCl3 MFC set to  0.000000
9/15/2010	2:00:25 PM	PHl3 MFC set to  0.000000
9/15/2010	2:00:25 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:00:25 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:00:26 PM	Tube furnace set to 0
9/15/2010	2:01:26 PM	H2 valve closed
9/15/2010	2:01:26 PM	BCl3 valve closed
9/15/2010	2:01:26 PM	PH3 valve closed
9/15/2010	2:01:26 PM	SiCl4 pre valve closed
9/15/2010	2:01:26 PM	SiCl4 post valve closed
9/15/2010	2:01:26 PM	Bubbler valve closed
9/15/2010	2:01:26 PM	Helium valve opened
9/15/2010	2:01:26 PM	Main Vac valve opened
9/15/2010	2:01:26 PM	Bypass valve opened
9/15/2010	2:01:26 PM	Helium MFC set to  100.000000
9/15/2010	2:01:26 PM	H2 MFC set to  0.000000
9/15/2010	2:01:26 PM	BCl3 MFC set to  0.000000
9/15/2010	2:01:26 PM	PHl3 MFC set to  0.000000
9/15/2010	2:01:26 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:01:26 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:01:26 PM	Tube furnace set to 0
9/15/2010	2:02:26 PM	Helium valve closed
9/15/2010	2:02:26 PM	H2 valve closed
9/15/2010	2:02:26 PM	BCl3 valve closed
9/15/2010	2:02:26 PM	PH3 valve closed
9/15/2010	2:02:26 PM	SiCl4 pre valve closed
9/15/2010	2:02:26 PM	SiCl4 post valve closed
9/15/2010	2:02:26 PM	Bubbler valve closed
9/15/2010	2:02:26 PM	Main Vac valve opened
9/15/2010	2:02:26 PM	Bypass valve opened
9/15/2010	2:02:26 PM	Helium MFC set to  0.000000
9/15/2010	2:02:26 PM	H2 MFC set to  0.000000
9/15/2010	2:02:26 PM	BCl3 MFC set to  0.000000
9/15/2010	2:02:26 PM	PHl3 MFC set to  0.000000
9/15/2010	2:02:26 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:02:26 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:02:26 PM	Tube furnace set to 0
9/15/2010	2:03:26 PM	H2 valve closed
9/15/2010	2:03:26 PM	BCl3 valve closed
9/15/2010	2:03:26 PM	PH3 valve closed
9/15/2010	2:03:26 PM	SiCl4 pre valve closed
9/15/2010	2:03:26 PM	SiCl4 post valve closed
9/15/2010	2:03:26 PM	Bubbler valve closed
9/15/2010	2:03:26 PM	Helium valve opened
9/15/2010	2:03:26 PM	Main Vac valve opened
9/15/2010	2:03:26 PM	Bypass valve opened
9/15/2010	2:03:26 PM	Helium MFC set to  100.000000
9/15/2010	2:03:26 PM	H2 MFC set to  0.000000
9/15/2010	2:03:26 PM	BCl3 MFC set to  0.000000
9/15/2010	2:03:26 PM	PHl3 MFC set to  0.000000
9/15/2010	2:03:26 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:03:26 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:03:26 PM	Tube furnace set to 0
9/15/2010	2:04:26 PM	Helium valve closed
9/15/2010	2:04:26 PM	H2 valve closed
9/15/2010	2:04:26 PM	BCl3 valve closed
9/15/2010	2:04:26 PM	PH3 valve closed
9/15/2010	2:04:26 PM	SiCl4 pre valve closed
9/15/2010	2:04:26 PM	SiCl4 post valve closed
9/15/2010	2:04:26 PM	Bubbler valve closed
9/15/2010	2:04:26 PM	Main Vac valve opened
9/15/2010	2:04:26 PM	Bypass valve opened
9/15/2010	2:04:26 PM	Helium MFC set to  0.000000
9/15/2010	2:04:26 PM	H2 MFC set to  0.000000
9/15/2010	2:04:26 PM	BCl3 MFC set to  0.000000
9/15/2010	2:04:26 PM	PHl3 MFC set to  0.000000
9/15/2010	2:04:26 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:04:26 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:04:26 PM	Tube furnace set to 0
9/15/2010	2:05:26 PM	H2 valve closed
9/15/2010	2:05:26 PM	BCl3 valve closed
9/15/2010	2:05:26 PM	PH3 valve closed
9/15/2010	2:05:26 PM	SiCl4 pre valve closed
9/15/2010	2:05:26 PM	SiCl4 post valve closed
9/15/2010	2:05:26 PM	Bubbler valve closed
9/15/2010	2:05:26 PM	Helium valve opened
9/15/2010	2:05:26 PM	Main Vac valve opened
9/15/2010	2:05:26 PM	Bypass valve opened
9/15/2010	2:05:26 PM	Helium MFC set to  100.000000
9/15/2010	2:05:26 PM	H2 MFC set to  0.000000
9/15/2010	2:05:26 PM	BCl3 MFC set to  0.000000
9/15/2010	2:05:26 PM	PHl3 MFC set to  0.000000
9/15/2010	2:05:26 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:05:26 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:05:27 PM	Tube furnace set to 0
9/15/2010	2:06:27 PM	Helium valve closed
9/15/2010	2:06:27 PM	H2 valve closed
9/15/2010	2:06:27 PM	BCl3 valve closed
9/15/2010	2:06:27 PM	PH3 valve closed
9/15/2010	2:06:27 PM	SiCl4 pre valve closed
9/15/2010	2:06:27 PM	SiCl4 post valve closed
9/15/2010	2:06:27 PM	Bubbler valve closed
9/15/2010	2:06:27 PM	Main Vac valve opened
9/15/2010	2:06:27 PM	Bypass valve opened
9/15/2010	2:06:27 PM	Helium MFC set to  0.000000
9/15/2010	2:06:27 PM	H2 MFC set to  0.000000
9/15/2010	2:06:27 PM	BCl3 MFC set to  0.000000
9/15/2010	2:06:27 PM	PHl3 MFC set to  0.000000
9/15/2010	2:06:27 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:06:27 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:06:27 PM	Tube furnace set to 0
9/15/2010	2:07:27 PM	H2 valve closed
9/15/2010	2:07:27 PM	BCl3 valve closed
9/15/2010	2:07:27 PM	PH3 valve closed
9/15/2010	2:07:27 PM	SiCl4 pre valve closed
9/15/2010	2:07:27 PM	SiCl4 post valve closed
9/15/2010	2:07:27 PM	Bubbler valve closed
9/15/2010	2:07:27 PM	Helium valve opened
9/15/2010	2:07:27 PM	Main Vac valve opened
9/15/2010	2:07:27 PM	Bypass valve opened
9/15/2010	2:07:27 PM	Helium MFC set to  100.000000
9/15/2010	2:07:27 PM	H2 MFC set to  0.000000
9/15/2010	2:07:27 PM	BCl3 MFC set to  0.000000
9/15/2010	2:07:27 PM	PHl3 MFC set to  0.000000
9/15/2010	2:07:27 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:07:27 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:07:27 PM	Tube furnace set to 0
9/15/2010	2:08:27 PM	Helium valve closed
9/15/2010	2:08:27 PM	H2 valve closed
9/15/2010	2:08:27 PM	BCl3 valve closed
9/15/2010	2:08:27 PM	PH3 valve closed
9/15/2010	2:08:27 PM	SiCl4 pre valve closed
9/15/2010	2:08:27 PM	SiCl4 post valve closed
9/15/2010	2:08:27 PM	Bubbler valve closed
9/15/2010	2:08:27 PM	Main Vac valve opened
9/15/2010	2:08:27 PM	Bypass valve opened
9/15/2010	2:08:27 PM	Helium MFC set to  0.000000
9/15/2010	2:08:27 PM	H2 MFC set to  0.000000
9/15/2010	2:08:27 PM	BCl3 MFC set to  0.000000
9/15/2010	2:08:27 PM	PHl3 MFC set to  0.000000
9/15/2010	2:08:27 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:08:27 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:08:27 PM	Tube furnace set to 0
9/15/2010	2:08:28 PM	Run finished at 2:08 PM
9/15/2010	2:08:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	2:12:32 PM	Helium MFC set to  100.000000
9/15/2010	2:12:34 PM	Helium valve opened
9/15/2010	2:29:17 PM	Helium valve closed
9/15/2010	2:29:20 PM	Helium MFC set to  0.000000
9/15/2010	2:30:01 PM	Recipe started at 2:30 PM
9/15/2010	2:30:01 PM	Helium valve closed
9/15/2010	2:30:01 PM	BCl3 valve closed
9/15/2010	2:30:01 PM	PH3 valve closed
9/15/2010	2:30:01 PM	SiCl4 pre valve closed
9/15/2010	2:30:01 PM	SiCl4 post valve closed
9/15/2010	2:30:01 PM	Main Vac valve closed
9/15/2010	2:30:01 PM	Bypass valve closed
9/15/2010	2:30:01 PM	Bubbler valve closed
9/15/2010	2:30:01 PM	H2 valve opened
9/15/2010	2:30:01 PM	Helium MFC set to  0.000000
9/15/2010	2:30:01 PM	H2 MFC set to  500.000000
9/15/2010	2:30:01 PM	BCl3 MFC set to  0.000000
9/15/2010	2:30:01 PM	PHl3 MFC set to  0.000000
9/15/2010	2:30:01 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:30:01 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:30:01 PM	Tube furnace set to 1000
9/15/2010	2:31:21 PM	Helium valve closed
9/15/2010	2:31:21 PM	BCl3 valve closed
9/15/2010	2:31:21 PM	PH3 valve closed
9/15/2010	2:31:21 PM	SiCl4 pre valve closed
9/15/2010	2:31:21 PM	SiCl4 post valve closed
9/15/2010	2:31:21 PM	Main Vac valve closed
9/15/2010	2:31:21 PM	Bypass valve closed
9/15/2010	2:31:21 PM	H2 valve opened
9/15/2010	2:31:21 PM	Bubbler valve opened
9/15/2010	2:31:21 PM	Helium MFC set to  0.000000
9/15/2010	2:31:21 PM	H2 MFC set to  500.000000
9/15/2010	2:31:21 PM	BCl3 MFC set to  0.000000
9/15/2010	2:31:21 PM	PHl3 MFC set to  0.000000
9/15/2010	2:31:21 PM	SiCl4 MFC set to  0.000000
9/15/2010	2:31:21 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:31:21 PM	Tube furnace set to 1000
9/15/2010	2:51:21 PM	Helium valve closed
9/15/2010	2:51:21 PM	PH3 valve closed
9/15/2010	2:51:21 PM	Main Vac valve closed
9/15/2010	2:51:21 PM	Bypass valve closed
9/15/2010	2:51:21 PM	H2 valve opened
9/15/2010	2:51:21 PM	BCl3 valve opened
9/15/2010	2:51:21 PM	SiCl4 pre valve opened
9/15/2010	2:51:21 PM	SiCl4 post valve opened
9/15/2010	2:51:21 PM	Bubbler valve opened
9/15/2010	2:51:21 PM	Helium MFC set to  0.000000
9/15/2010	2:51:21 PM	H2 MFC set to  500.000000
9/15/2010	2:51:21 PM	BCl3 MFC set to  29.000000
9/15/2010	2:51:21 PM	PHl3 MFC set to  0.000000
9/15/2010	2:51:21 PM	SiCl4 MFC set to  50.000000
9/15/2010	2:51:21 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	2:51:21 PM	Tube furnace set to 1000
9/15/2010	3:03:22 PM	Helium valve closed
9/15/2010	3:03:22 PM	BCl3 valve closed
9/15/2010	3:03:22 PM	PH3 valve closed
9/15/2010	3:03:22 PM	SiCl4 pre valve closed
9/15/2010	3:03:22 PM	SiCl4 post valve closed
9/15/2010	3:03:22 PM	Main Vac valve closed
9/15/2010	3:03:22 PM	Bypass valve closed
9/15/2010	3:03:22 PM	H2 valve opened
9/15/2010	3:03:22 PM	Bubbler valve opened
9/15/2010	3:03:22 PM	Helium MFC set to  0.000000
9/15/2010	3:03:22 PM	H2 MFC set to  500.000000
9/15/2010	3:03:22 PM	BCl3 MFC set to  0.000000
9/15/2010	3:03:22 PM	PHl3 MFC set to  0.000000
9/15/2010	3:03:22 PM	SiCl4 MFC set to  0.000000
9/15/2010	3:03:22 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	3:03:22 PM	Tube furnace set to 750
9/15/2010	3:23:22 PM	H2 valve closed
9/15/2010	3:23:22 PM	BCl3 valve closed
9/15/2010	3:23:22 PM	PH3 valve closed
9/15/2010	3:23:22 PM	SiCl4 pre valve closed
9/15/2010	3:23:22 PM	SiCl4 post valve closed
9/15/2010	3:23:22 PM	Main Vac valve closed
9/15/2010	3:23:22 PM	Bypass valve closed
9/15/2010	3:23:22 PM	Helium valve opened
9/15/2010	3:23:22 PM	Bubbler valve opened
9/15/2010	3:23:22 PM	Helium MFC set to  500.000000
9/15/2010	3:23:22 PM	H2 MFC set to  0.000000
9/15/2010	3:23:22 PM	BCl3 MFC set to  0.000000
9/15/2010	3:23:22 PM	PHl3 MFC set to  0.000000
9/15/2010	3:23:22 PM	SiCl4 MFC set to  0.000000
9/15/2010	3:23:22 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	3:23:22 PM	Tube furnace set to 0
9/15/2010	3:32:30 PM	Run aborted at 3:32 PM
9/15/2010	3:32:30 PM	Helium valve closed
9/15/2010	3:32:30 PM	H2 valve closed
9/15/2010	3:32:30 PM	BCl3 valve closed
9/15/2010	3:32:30 PM	PH3 valve closed
9/15/2010	3:32:30 PM	SiCl4 pre valve closed
9/15/2010	3:32:30 PM	SiCl4 post valve closed
9/15/2010	3:32:30 PM	Bypass valve closed
9/15/2010	3:32:30 PM	Main Vac valve closed
9/15/2010	3:32:30 PM	Bubbler valve closed
9/15/2010	3:32:30 PM	Helium MFC set to  0.000000
9/15/2010	3:32:30 PM	H2 MFC set to  0.000000
9/15/2010	3:32:30 PM	BCl3 MFC set to  0.000000
9/15/2010	3:32:30 PM	PHl3 MFC set to  0.000000
9/15/2010	3:32:30 PM	SiCl4 MFC set to  0.000000
9/15/2010	3:32:30 PM	Tube furnace set to 0
9/15/2010	3:32:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	3:32:32 PM	Recipe started at 3:32 PM
9/15/2010	3:32:32 PM	H2 valve closed
9/15/2010	3:32:32 PM	BCl3 valve closed
9/15/2010	3:32:32 PM	PH3 valve closed
9/15/2010	3:32:32 PM	SiCl4 pre valve closed
9/15/2010	3:32:32 PM	SiCl4 post valve closed
9/15/2010	3:32:32 PM	Main Vac valve closed
9/15/2010	3:32:32 PM	Bypass valve closed
9/15/2010	3:32:32 PM	Bubbler valve closed
9/15/2010	3:32:32 PM	Helium valve opened
9/15/2010	3:32:32 PM	Helium MFC set to  500.000000
9/15/2010	3:32:32 PM	H2 MFC set to  0.000000
9/15/2010	3:32:32 PM	BCl3 MFC set to  0.000000
9/15/2010	3:32:32 PM	PHl3 MFC set to  0.000000
9/15/2010	3:32:32 PM	SiCl4 MFC set to  0.000000
9/15/2010	3:32:32 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	3:32:32 PM	Tube furnace set to 0
9/15/2010	3:32:33 PM	Helium valve closed
9/15/2010	3:32:33 PM	H2 valve closed
9/15/2010	3:32:33 PM	BCl3 valve closed
9/15/2010	3:32:33 PM	PH3 valve closed
9/15/2010	3:32:33 PM	SiCl4 pre valve closed
9/15/2010	3:32:33 PM	SiCl4 post valve closed
9/15/2010	3:32:33 PM	Main Vac valve closed
9/15/2010	3:32:33 PM	Bypass valve closed
9/15/2010	3:32:33 PM	Bubbler valve closed
9/15/2010	3:32:33 PM	Helium MFC set to  0.000000
9/15/2010	3:32:33 PM	H2 MFC set to  0.000000
9/15/2010	3:32:33 PM	BCl3 MFC set to  0.000000
9/15/2010	3:32:33 PM	PHl3 MFC set to  0.000000
9/15/2010	3:32:33 PM	SiCl4 MFC set to  0.000000
9/15/2010	3:32:33 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	3:32:33 PM	Tube furnace set to 0
9/15/2010	3:32:33 PM	Run finished at 3:32 PM
9/15/2010	3:32:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	3:55:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	3:55:43 PM	Recipe started at 3:55 PM
9/15/2010	3:55:43 PM	Helium valve closed
9/15/2010	3:55:43 PM	H2 valve closed
9/15/2010	3:55:43 PM	BCl3 valve closed
9/15/2010	3:55:43 PM	PH3 valve closed
9/15/2010	3:55:43 PM	SiCl4 pre valve closed
9/15/2010	3:55:43 PM	SiCl4 post valve closed
9/15/2010	3:55:43 PM	Main Vac valve closed
9/15/2010	3:55:43 PM	Bubbler valve closed
9/15/2010	3:55:43 PM	Bypass valve opened
9/15/2010	3:55:43 PM	Helium MFC set to  0.000000
9/15/2010	3:55:43 PM	H2 MFC set to  0.000000
9/15/2010	3:55:43 PM	BCl3 MFC set to  0.000000
9/15/2010	3:55:43 PM	PHl3 MFC set to  0.000000
9/15/2010	3:55:43 PM	SiCl4 MFC set to  0.000000
9/15/2010	3:55:43 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	3:55:43 PM	Tube furnace set to 0
9/15/2010	3:56:24 PM	Helium valve closed
9/15/2010	3:56:24 PM	H2 valve closed
9/15/2010	3:56:24 PM	BCl3 valve closed
9/15/2010	3:56:24 PM	PH3 valve closed
9/15/2010	3:56:24 PM	SiCl4 pre valve closed
9/15/2010	3:56:24 PM	SiCl4 post valve closed
9/15/2010	3:56:24 PM	Bubbler valve closed
9/15/2010	3:56:24 PM	Main Vac valve opened
9/15/2010	3:56:24 PM	Bypass valve opened
9/15/2010	3:56:24 PM	Helium MFC set to  0.000000
9/15/2010	3:56:24 PM	H2 MFC set to  0.000000
9/15/2010	3:56:24 PM	BCl3 MFC set to  0.000000
9/15/2010	3:56:24 PM	PHl3 MFC set to  0.000000
9/15/2010	3:56:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	3:56:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	3:56:25 PM	Tube furnace set to 0
9/15/2010	3:56:25 PM	Run finished at 3:56 PM
9/15/2010	3:56:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	4:02:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	4:02:23 PM	Recipe started at 4:02 PM
9/15/2010	4:02:23 PM	Helium valve closed
9/15/2010	4:02:23 PM	H2 valve closed
9/15/2010	4:02:23 PM	BCl3 valve closed
9/15/2010	4:02:23 PM	PH3 valve closed
9/15/2010	4:02:23 PM	SiCl4 pre valve closed
9/15/2010	4:02:23 PM	SiCl4 post valve closed
9/15/2010	4:02:23 PM	Main Vac valve closed
9/15/2010	4:02:23 PM	Bubbler valve closed
9/15/2010	4:02:23 PM	Bypass valve opened
9/15/2010	4:02:23 PM	Helium MFC set to  0.000000
9/15/2010	4:02:23 PM	H2 MFC set to  0.000000
9/15/2010	4:02:23 PM	BCl3 MFC set to  0.000000
9/15/2010	4:02:23 PM	PHl3 MFC set to  0.000000
9/15/2010	4:02:23 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:02:23 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:02:23 PM	Tube furnace set to 0
9/15/2010	4:02:23 PM	Helium valve closed
9/15/2010	4:02:23 PM	H2 valve closed
9/15/2010	4:02:23 PM	BCl3 valve closed
9/15/2010	4:02:23 PM	PH3 valve closed
9/15/2010	4:02:23 PM	SiCl4 pre valve closed
9/15/2010	4:02:23 PM	SiCl4 post valve closed
9/15/2010	4:02:23 PM	Bubbler valve closed
9/15/2010	4:02:23 PM	Main Vac valve opened
9/15/2010	4:02:23 PM	Bypass valve opened
9/15/2010	4:02:23 PM	Helium MFC set to  0.000000
9/15/2010	4:02:23 PM	H2 MFC set to  0.000000
9/15/2010	4:02:23 PM	BCl3 MFC set to  0.000000
9/15/2010	4:02:23 PM	PHl3 MFC set to  0.000000
9/15/2010	4:02:23 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:02:23 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:02:23 PM	Tube furnace set to 0
9/15/2010	4:03:23 PM	H2 valve closed
9/15/2010	4:03:23 PM	BCl3 valve closed
9/15/2010	4:03:23 PM	PH3 valve closed
9/15/2010	4:03:23 PM	SiCl4 pre valve closed
9/15/2010	4:03:23 PM	SiCl4 post valve closed
9/15/2010	4:03:23 PM	Bubbler valve closed
9/15/2010	4:03:23 PM	Helium valve opened
9/15/2010	4:03:23 PM	Main Vac valve opened
9/15/2010	4:03:23 PM	Bypass valve opened
9/15/2010	4:03:23 PM	Helium MFC set to  100.000000
9/15/2010	4:03:23 PM	H2 MFC set to  0.000000
9/15/2010	4:03:23 PM	BCl3 MFC set to  0.000000
9/15/2010	4:03:23 PM	PHl3 MFC set to  0.000000
9/15/2010	4:03:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:03:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:03:24 PM	Tube furnace set to 0
9/15/2010	4:04:24 PM	Helium valve closed
9/15/2010	4:04:24 PM	H2 valve closed
9/15/2010	4:04:24 PM	BCl3 valve closed
9/15/2010	4:04:24 PM	PH3 valve closed
9/15/2010	4:04:24 PM	SiCl4 pre valve closed
9/15/2010	4:04:24 PM	SiCl4 post valve closed
9/15/2010	4:04:24 PM	Bubbler valve closed
9/15/2010	4:04:24 PM	Main Vac valve opened
9/15/2010	4:04:24 PM	Bypass valve opened
9/15/2010	4:04:24 PM	Helium MFC set to  0.000000
9/15/2010	4:04:24 PM	H2 MFC set to  0.000000
9/15/2010	4:04:24 PM	BCl3 MFC set to  0.000000
9/15/2010	4:04:24 PM	PHl3 MFC set to  0.000000
9/15/2010	4:04:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:04:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:04:24 PM	Tube furnace set to 0
9/15/2010	4:05:24 PM	H2 valve closed
9/15/2010	4:05:24 PM	BCl3 valve closed
9/15/2010	4:05:24 PM	PH3 valve closed
9/15/2010	4:05:24 PM	SiCl4 pre valve closed
9/15/2010	4:05:24 PM	SiCl4 post valve closed
9/15/2010	4:05:24 PM	Bubbler valve closed
9/15/2010	4:05:24 PM	Helium valve opened
9/15/2010	4:05:24 PM	Main Vac valve opened
9/15/2010	4:05:24 PM	Bypass valve opened
9/15/2010	4:05:24 PM	Helium MFC set to  100.000000
9/15/2010	4:05:24 PM	H2 MFC set to  0.000000
9/15/2010	4:05:24 PM	BCl3 MFC set to  0.000000
9/15/2010	4:05:24 PM	PHl3 MFC set to  0.000000
9/15/2010	4:05:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:05:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:05:24 PM	Tube furnace set to 0
9/15/2010	4:06:24 PM	Helium valve closed
9/15/2010	4:06:24 PM	H2 valve closed
9/15/2010	4:06:24 PM	BCl3 valve closed
9/15/2010	4:06:24 PM	PH3 valve closed
9/15/2010	4:06:24 PM	SiCl4 pre valve closed
9/15/2010	4:06:24 PM	SiCl4 post valve closed
9/15/2010	4:06:24 PM	Bubbler valve closed
9/15/2010	4:06:24 PM	Main Vac valve opened
9/15/2010	4:06:24 PM	Bypass valve opened
9/15/2010	4:06:24 PM	Helium MFC set to  0.000000
9/15/2010	4:06:24 PM	H2 MFC set to  0.000000
9/15/2010	4:06:24 PM	BCl3 MFC set to  0.000000
9/15/2010	4:06:24 PM	PHl3 MFC set to  0.000000
9/15/2010	4:06:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:06:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:06:24 PM	Tube furnace set to 0
9/15/2010	4:07:24 PM	H2 valve closed
9/15/2010	4:07:24 PM	BCl3 valve closed
9/15/2010	4:07:24 PM	PH3 valve closed
9/15/2010	4:07:24 PM	SiCl4 pre valve closed
9/15/2010	4:07:24 PM	SiCl4 post valve closed
9/15/2010	4:07:24 PM	Bubbler valve closed
9/15/2010	4:07:24 PM	Helium valve opened
9/15/2010	4:07:24 PM	Main Vac valve opened
9/15/2010	4:07:24 PM	Bypass valve opened
9/15/2010	4:07:24 PM	Helium MFC set to  100.000000
9/15/2010	4:07:24 PM	H2 MFC set to  0.000000
9/15/2010	4:07:24 PM	BCl3 MFC set to  0.000000
9/15/2010	4:07:24 PM	PHl3 MFC set to  0.000000
9/15/2010	4:07:24 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:07:24 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:07:24 PM	Tube furnace set to 0
9/15/2010	4:08:25 PM	Helium valve closed
9/15/2010	4:08:25 PM	H2 valve closed
9/15/2010	4:08:25 PM	BCl3 valve closed
9/15/2010	4:08:25 PM	PH3 valve closed
9/15/2010	4:08:25 PM	SiCl4 pre valve closed
9/15/2010	4:08:25 PM	SiCl4 post valve closed
9/15/2010	4:08:25 PM	Bubbler valve closed
9/15/2010	4:08:25 PM	Main Vac valve opened
9/15/2010	4:08:25 PM	Bypass valve opened
9/15/2010	4:08:25 PM	Helium MFC set to  0.000000
9/15/2010	4:08:25 PM	H2 MFC set to  0.000000
9/15/2010	4:08:25 PM	BCl3 MFC set to  0.000000
9/15/2010	4:08:25 PM	PHl3 MFC set to  0.000000
9/15/2010	4:08:25 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:08:25 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:08:25 PM	Tube furnace set to 0
9/15/2010	4:09:25 PM	H2 valve closed
9/15/2010	4:09:25 PM	BCl3 valve closed
9/15/2010	4:09:25 PM	PH3 valve closed
9/15/2010	4:09:25 PM	SiCl4 pre valve closed
9/15/2010	4:09:25 PM	SiCl4 post valve closed
9/15/2010	4:09:25 PM	Bubbler valve closed
9/15/2010	4:09:25 PM	Helium valve opened
9/15/2010	4:09:25 PM	Main Vac valve opened
9/15/2010	4:09:25 PM	Bypass valve opened
9/15/2010	4:09:25 PM	Helium MFC set to  100.000000
9/15/2010	4:09:25 PM	H2 MFC set to  0.000000
9/15/2010	4:09:25 PM	BCl3 MFC set to  0.000000
9/15/2010	4:09:25 PM	PHl3 MFC set to  0.000000
9/15/2010	4:09:25 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:09:25 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:09:25 PM	Tube furnace set to 0
9/15/2010	4:10:25 PM	Helium valve closed
9/15/2010	4:10:25 PM	H2 valve closed
9/15/2010	4:10:25 PM	BCl3 valve closed
9/15/2010	4:10:25 PM	PH3 valve closed
9/15/2010	4:10:25 PM	SiCl4 pre valve closed
9/15/2010	4:10:25 PM	SiCl4 post valve closed
9/15/2010	4:10:25 PM	Bubbler valve closed
9/15/2010	4:10:25 PM	Main Vac valve opened
9/15/2010	4:10:25 PM	Bypass valve opened
9/15/2010	4:10:25 PM	Helium MFC set to  0.000000
9/15/2010	4:10:25 PM	H2 MFC set to  0.000000
9/15/2010	4:10:25 PM	BCl3 MFC set to  0.000000
9/15/2010	4:10:25 PM	PHl3 MFC set to  0.000000
9/15/2010	4:10:25 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:10:25 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:10:25 PM	Tube furnace set to 0
9/15/2010	4:11:25 PM	H2 valve closed
9/15/2010	4:11:25 PM	BCl3 valve closed
9/15/2010	4:11:25 PM	PH3 valve closed
9/15/2010	4:11:25 PM	SiCl4 pre valve closed
9/15/2010	4:11:25 PM	SiCl4 post valve closed
9/15/2010	4:11:25 PM	Bubbler valve closed
9/15/2010	4:11:25 PM	Helium valve opened
9/15/2010	4:11:25 PM	Main Vac valve opened
9/15/2010	4:11:25 PM	Bypass valve opened
9/15/2010	4:11:25 PM	Helium MFC set to  100.000000
9/15/2010	4:11:25 PM	H2 MFC set to  0.000000
9/15/2010	4:11:25 PM	BCl3 MFC set to  0.000000
9/15/2010	4:11:25 PM	PHl3 MFC set to  0.000000
9/15/2010	4:11:25 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:11:25 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:11:25 PM	Tube furnace set to 0
9/15/2010	4:12:25 PM	Helium valve closed
9/15/2010	4:12:25 PM	H2 valve closed
9/15/2010	4:12:25 PM	BCl3 valve closed
9/15/2010	4:12:25 PM	PH3 valve closed
9/15/2010	4:12:25 PM	SiCl4 pre valve closed
9/15/2010	4:12:25 PM	SiCl4 post valve closed
9/15/2010	4:12:25 PM	Bubbler valve closed
9/15/2010	4:12:25 PM	Main Vac valve opened
9/15/2010	4:12:25 PM	Bypass valve opened
9/15/2010	4:12:25 PM	Helium MFC set to  0.000000
9/15/2010	4:12:25 PM	H2 MFC set to  0.000000
9/15/2010	4:12:25 PM	BCl3 MFC set to  0.000000
9/15/2010	4:12:25 PM	PHl3 MFC set to  0.000000
9/15/2010	4:12:25 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:12:25 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:12:25 PM	Tube furnace set to 0
9/15/2010	4:13:26 PM	H2 valve closed
9/15/2010	4:13:26 PM	BCl3 valve closed
9/15/2010	4:13:26 PM	PH3 valve closed
9/15/2010	4:13:26 PM	SiCl4 pre valve closed
9/15/2010	4:13:26 PM	SiCl4 post valve closed
9/15/2010	4:13:26 PM	Bubbler valve closed
9/15/2010	4:13:26 PM	Helium valve opened
9/15/2010	4:13:26 PM	Main Vac valve opened
9/15/2010	4:13:26 PM	Bypass valve opened
9/15/2010	4:13:26 PM	Helium MFC set to  100.000000
9/15/2010	4:13:26 PM	H2 MFC set to  0.000000
9/15/2010	4:13:26 PM	BCl3 MFC set to  0.000000
9/15/2010	4:13:26 PM	PHl3 MFC set to  0.000000
9/15/2010	4:13:26 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:13:26 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:13:26 PM	Tube furnace set to 0
9/15/2010	4:14:26 PM	Helium valve closed
9/15/2010	4:14:26 PM	H2 valve closed
9/15/2010	4:14:26 PM	BCl3 valve closed
9/15/2010	4:14:26 PM	PH3 valve closed
9/15/2010	4:14:26 PM	SiCl4 pre valve closed
9/15/2010	4:14:26 PM	SiCl4 post valve closed
9/15/2010	4:14:26 PM	Bubbler valve closed
9/15/2010	4:14:26 PM	Main Vac valve opened
9/15/2010	4:14:26 PM	Bypass valve opened
9/15/2010	4:14:26 PM	Helium MFC set to  0.000000
9/15/2010	4:14:26 PM	H2 MFC set to  0.000000
9/15/2010	4:14:26 PM	BCl3 MFC set to  0.000000
9/15/2010	4:14:26 PM	PHl3 MFC set to  0.000000
9/15/2010	4:14:26 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:14:26 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:14:26 PM	Tube furnace set to 0
9/15/2010	4:15:26 PM	H2 valve closed
9/15/2010	4:15:26 PM	BCl3 valve closed
9/15/2010	4:15:26 PM	PH3 valve closed
9/15/2010	4:15:26 PM	SiCl4 pre valve closed
9/15/2010	4:15:26 PM	SiCl4 post valve closed
9/15/2010	4:15:26 PM	Bubbler valve closed
9/15/2010	4:15:26 PM	Helium valve opened
9/15/2010	4:15:26 PM	Main Vac valve opened
9/15/2010	4:15:26 PM	Bypass valve opened
9/15/2010	4:15:26 PM	Helium MFC set to  100.000000
9/15/2010	4:15:26 PM	H2 MFC set to  0.000000
9/15/2010	4:15:26 PM	BCl3 MFC set to  0.000000
9/15/2010	4:15:26 PM	PHl3 MFC set to  0.000000
9/15/2010	4:15:26 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:15:26 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:15:26 PM	Tube furnace set to 0
9/15/2010	4:16:26 PM	Helium valve closed
9/15/2010	4:16:26 PM	H2 valve closed
9/15/2010	4:16:26 PM	BCl3 valve closed
9/15/2010	4:16:26 PM	PH3 valve closed
9/15/2010	4:16:26 PM	SiCl4 pre valve closed
9/15/2010	4:16:26 PM	SiCl4 post valve closed
9/15/2010	4:16:26 PM	Bubbler valve closed
9/15/2010	4:16:26 PM	Main Vac valve opened
9/15/2010	4:16:26 PM	Bypass valve opened
9/15/2010	4:16:26 PM	Helium MFC set to  0.000000
9/15/2010	4:16:26 PM	H2 MFC set to  0.000000
9/15/2010	4:16:26 PM	BCl3 MFC set to  0.000000
9/15/2010	4:16:26 PM	PHl3 MFC set to  0.000000
9/15/2010	4:16:26 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:16:26 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:16:26 PM	Tube furnace set to 0
9/15/2010	4:17:26 PM	H2 valve closed
9/15/2010	4:17:26 PM	BCl3 valve closed
9/15/2010	4:17:26 PM	PH3 valve closed
9/15/2010	4:17:26 PM	SiCl4 pre valve closed
9/15/2010	4:17:26 PM	SiCl4 post valve closed
9/15/2010	4:17:26 PM	Bubbler valve closed
9/15/2010	4:17:26 PM	Helium valve opened
9/15/2010	4:17:26 PM	Main Vac valve opened
9/15/2010	4:17:26 PM	Bypass valve opened
9/15/2010	4:17:26 PM	Helium MFC set to  100.000000
9/15/2010	4:17:26 PM	H2 MFC set to  0.000000
9/15/2010	4:17:26 PM	BCl3 MFC set to  0.000000
9/15/2010	4:17:26 PM	PHl3 MFC set to  0.000000
9/15/2010	4:17:26 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:17:26 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:17:27 PM	Tube furnace set to 0
9/15/2010	4:18:27 PM	Helium valve closed
9/15/2010	4:18:27 PM	H2 valve closed
9/15/2010	4:18:27 PM	BCl3 valve closed
9/15/2010	4:18:27 PM	PH3 valve closed
9/15/2010	4:18:27 PM	SiCl4 pre valve closed
9/15/2010	4:18:27 PM	SiCl4 post valve closed
9/15/2010	4:18:27 PM	Bubbler valve closed
9/15/2010	4:18:27 PM	Main Vac valve opened
9/15/2010	4:18:27 PM	Bypass valve opened
9/15/2010	4:18:27 PM	Helium MFC set to  0.000000
9/15/2010	4:18:27 PM	H2 MFC set to  0.000000
9/15/2010	4:18:27 PM	BCl3 MFC set to  0.000000
9/15/2010	4:18:27 PM	PHl3 MFC set to  0.000000
9/15/2010	4:18:27 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:18:27 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:18:27 PM	Tube furnace set to 0
9/15/2010	4:19:27 PM	H2 valve closed
9/15/2010	4:19:27 PM	BCl3 valve closed
9/15/2010	4:19:27 PM	PH3 valve closed
9/15/2010	4:19:27 PM	SiCl4 pre valve closed
9/15/2010	4:19:27 PM	SiCl4 post valve closed
9/15/2010	4:19:27 PM	Bubbler valve closed
9/15/2010	4:19:27 PM	Helium valve opened
9/15/2010	4:19:27 PM	Main Vac valve opened
9/15/2010	4:19:27 PM	Bypass valve opened
9/15/2010	4:19:27 PM	Helium MFC set to  100.000000
9/15/2010	4:19:27 PM	H2 MFC set to  0.000000
9/15/2010	4:19:27 PM	BCl3 MFC set to  0.000000
9/15/2010	4:19:27 PM	PHl3 MFC set to  0.000000
9/15/2010	4:19:27 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:19:27 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:19:27 PM	Tube furnace set to 0
9/15/2010	4:20:27 PM	Helium valve closed
9/15/2010	4:20:27 PM	H2 valve closed
9/15/2010	4:20:27 PM	BCl3 valve closed
9/15/2010	4:20:27 PM	PH3 valve closed
9/15/2010	4:20:27 PM	SiCl4 pre valve closed
9/15/2010	4:20:27 PM	SiCl4 post valve closed
9/15/2010	4:20:27 PM	Bubbler valve closed
9/15/2010	4:20:27 PM	Main Vac valve opened
9/15/2010	4:20:27 PM	Bypass valve opened
9/15/2010	4:20:27 PM	Helium MFC set to  0.000000
9/15/2010	4:20:27 PM	H2 MFC set to  0.000000
9/15/2010	4:20:27 PM	BCl3 MFC set to  0.000000
9/15/2010	4:20:27 PM	PHl3 MFC set to  0.000000
9/15/2010	4:20:27 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:20:27 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:20:27 PM	Tube furnace set to 0
9/15/2010	4:21:27 PM	H2 valve closed
9/15/2010	4:21:27 PM	BCl3 valve closed
9/15/2010	4:21:27 PM	PH3 valve closed
9/15/2010	4:21:27 PM	SiCl4 pre valve closed
9/15/2010	4:21:27 PM	SiCl4 post valve closed
9/15/2010	4:21:27 PM	Bubbler valve closed
9/15/2010	4:21:27 PM	Helium valve opened
9/15/2010	4:21:27 PM	Main Vac valve opened
9/15/2010	4:21:27 PM	Bypass valve opened
9/15/2010	4:21:27 PM	Helium MFC set to  100.000000
9/15/2010	4:21:27 PM	H2 MFC set to  0.000000
9/15/2010	4:21:27 PM	BCl3 MFC set to  0.000000
9/15/2010	4:21:27 PM	PHl3 MFC set to  0.000000
9/15/2010	4:21:27 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:21:27 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:21:27 PM	Tube furnace set to 0
9/15/2010	4:22:27 PM	Helium valve closed
9/15/2010	4:22:27 PM	H2 valve closed
9/15/2010	4:22:27 PM	BCl3 valve closed
9/15/2010	4:22:27 PM	PH3 valve closed
9/15/2010	4:22:27 PM	SiCl4 pre valve closed
9/15/2010	4:22:27 PM	SiCl4 post valve closed
9/15/2010	4:22:27 PM	Bubbler valve closed
9/15/2010	4:22:27 PM	Main Vac valve opened
9/15/2010	4:22:27 PM	Bypass valve opened
9/15/2010	4:22:27 PM	Helium MFC set to  0.000000
9/15/2010	4:22:27 PM	H2 MFC set to  0.000000
9/15/2010	4:22:27 PM	BCl3 MFC set to  0.000000
9/15/2010	4:22:27 PM	PHl3 MFC set to  0.000000
9/15/2010	4:22:27 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:22:27 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:22:28 PM	Tube furnace set to 0
9/15/2010	4:22:29 PM	Run finished at 4:22 PM
9/15/2010	4:22:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	4:26:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	4:26:49 PM	Recipe started at 4:26 PM
9/15/2010	4:26:49 PM	Helium valve closed
9/15/2010	4:26:49 PM	H2 valve closed
9/15/2010	4:26:49 PM	BCl3 valve closed
9/15/2010	4:26:49 PM	PH3 valve closed
9/15/2010	4:26:49 PM	SiCl4 pre valve closed
9/15/2010	4:26:49 PM	SiCl4 post valve closed
9/15/2010	4:26:49 PM	Main Vac valve closed
9/15/2010	4:26:49 PM	Bubbler valve closed
9/15/2010	4:26:49 PM	Bypass valve opened
9/15/2010	4:26:49 PM	Helium MFC set to  0.000000
9/15/2010	4:26:49 PM	H2 MFC set to  0.000000
9/15/2010	4:26:49 PM	BCl3 MFC set to  0.000000
9/15/2010	4:26:49 PM	PHl3 MFC set to  0.000000
9/15/2010	4:26:49 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:26:49 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:26:49 PM	Tube furnace set to 0
9/15/2010	4:26:49 PM	Helium valve closed
9/15/2010	4:26:49 PM	H2 valve closed
9/15/2010	4:26:49 PM	BCl3 valve closed
9/15/2010	4:26:49 PM	PH3 valve closed
9/15/2010	4:26:49 PM	SiCl4 pre valve closed
9/15/2010	4:26:49 PM	SiCl4 post valve closed
9/15/2010	4:26:49 PM	Bubbler valve closed
9/15/2010	4:26:49 PM	Main Vac valve opened
9/15/2010	4:26:49 PM	Bypass valve opened
9/15/2010	4:26:49 PM	Helium MFC set to  0.000000
9/15/2010	4:26:49 PM	H2 MFC set to  0.000000
9/15/2010	4:26:49 PM	BCl3 MFC set to  0.000000
9/15/2010	4:26:49 PM	PHl3 MFC set to  0.000000
9/15/2010	4:26:49 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:26:49 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:26:49 PM	Tube furnace set to 0
9/15/2010	4:26:50 PM	Run finished at 4:26 PM
9/15/2010	4:26:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	4:26:58 PM	Helium valve opened
9/15/2010	4:27:03 PM	Helium MFC set to  100.000000
9/15/2010	4:31:40 PM	Helium valve closed
9/15/2010	4:31:44 PM	Helium MFC set to  0.000000
9/15/2010	4:31:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	4:31:46 PM	Recipe started at 4:31 PM
9/15/2010	4:31:46 PM	Helium valve closed
9/15/2010	4:31:46 PM	H2 valve closed
9/15/2010	4:31:46 PM	BCl3 valve closed
9/15/2010	4:31:46 PM	PH3 valve closed
9/15/2010	4:31:46 PM	SiCl4 pre valve closed
9/15/2010	4:31:46 PM	SiCl4 post valve closed
9/15/2010	4:31:46 PM	Main Vac valve closed
9/15/2010	4:31:46 PM	Bubbler valve closed
9/15/2010	4:31:46 PM	Bypass valve opened
9/15/2010	4:31:46 PM	Helium MFC set to  0.000000
9/15/2010	4:31:46 PM	H2 MFC set to  0.000000
9/15/2010	4:31:46 PM	BCl3 MFC set to  0.000000
9/15/2010	4:31:46 PM	PHl3 MFC set to  0.000000
9/15/2010	4:31:46 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:31:46 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:31:46 PM	Tube furnace set to 0
9/15/2010	4:31:46 PM	Helium valve closed
9/15/2010	4:31:46 PM	H2 valve closed
9/15/2010	4:31:46 PM	BCl3 valve closed
9/15/2010	4:31:46 PM	PH3 valve closed
9/15/2010	4:31:46 PM	SiCl4 pre valve closed
9/15/2010	4:31:46 PM	SiCl4 post valve closed
9/15/2010	4:31:46 PM	Bubbler valve closed
9/15/2010	4:31:46 PM	Main Vac valve opened
9/15/2010	4:31:46 PM	Bypass valve opened
9/15/2010	4:31:46 PM	Helium MFC set to  0.000000
9/15/2010	4:31:46 PM	H2 MFC set to  0.000000
9/15/2010	4:31:46 PM	BCl3 MFC set to  0.000000
9/15/2010	4:31:46 PM	PHl3 MFC set to  0.000000
9/15/2010	4:31:46 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:31:46 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:31:46 PM	Tube furnace set to 0
9/15/2010	4:31:47 PM	Run finished at 4:31 PM
9/15/2010	4:31:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	4:32:37 PM	Recipe started at 4:32 PM
9/15/2010	4:32:37 PM	Helium valve closed
9/15/2010	4:32:37 PM	BCl3 valve closed
9/15/2010	4:32:37 PM	PH3 valve closed
9/15/2010	4:32:37 PM	SiCl4 pre valve closed
9/15/2010	4:32:37 PM	SiCl4 post valve closed
9/15/2010	4:32:37 PM	Main Vac valve closed
9/15/2010	4:32:37 PM	Bypass valve closed
9/15/2010	4:32:37 PM	Bubbler valve closed
9/15/2010	4:32:37 PM	H2 valve opened
9/15/2010	4:32:37 PM	Helium MFC set to  0.000000
9/15/2010	4:32:37 PM	H2 MFC set to  500.000000
9/15/2010	4:32:37 PM	BCl3 MFC set to  0.000000
9/15/2010	4:32:37 PM	PHl3 MFC set to  0.000000
9/15/2010	4:32:37 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:32:37 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:32:37 PM	Tube furnace set to 1000
9/15/2010	4:33:56 PM	Helium valve closed
9/15/2010	4:33:56 PM	BCl3 valve closed
9/15/2010	4:33:56 PM	PH3 valve closed
9/15/2010	4:33:56 PM	SiCl4 pre valve closed
9/15/2010	4:33:56 PM	SiCl4 post valve closed
9/15/2010	4:33:56 PM	Main Vac valve closed
9/15/2010	4:33:56 PM	Bypass valve closed
9/15/2010	4:33:56 PM	H2 valve opened
9/15/2010	4:33:56 PM	Bubbler valve opened
9/15/2010	4:33:56 PM	Helium MFC set to  0.000000
9/15/2010	4:33:56 PM	H2 MFC set to  500.000000
9/15/2010	4:33:56 PM	BCl3 MFC set to  0.000000
9/15/2010	4:33:56 PM	PHl3 MFC set to  0.000000
9/15/2010	4:33:56 PM	SiCl4 MFC set to  0.000000
9/15/2010	4:33:56 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:33:56 PM	Tube furnace set to 1000
9/15/2010	4:53:56 PM	Helium valve closed
9/15/2010	4:53:56 PM	PH3 valve closed
9/15/2010	4:53:56 PM	Main Vac valve closed
9/15/2010	4:53:56 PM	Bypass valve closed
9/15/2010	4:53:56 PM	H2 valve opened
9/15/2010	4:53:56 PM	BCl3 valve opened
9/15/2010	4:53:56 PM	SiCl4 pre valve opened
9/15/2010	4:53:56 PM	SiCl4 post valve opened
9/15/2010	4:53:56 PM	Bubbler valve opened
9/15/2010	4:53:56 PM	Helium MFC set to  0.000000
9/15/2010	4:53:56 PM	H2 MFC set to  500.000000
9/15/2010	4:53:56 PM	BCl3 MFC set to  29.000000
9/15/2010	4:53:56 PM	PHl3 MFC set to  0.000000
9/15/2010	4:53:56 PM	SiCl4 MFC set to  50.000000
9/15/2010	4:53:56 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	4:53:56 PM	Tube furnace set to 1000
9/15/2010	5:05:56 PM	Helium valve closed
9/15/2010	5:05:56 PM	BCl3 valve closed
9/15/2010	5:05:56 PM	PH3 valve closed
9/15/2010	5:05:56 PM	SiCl4 pre valve closed
9/15/2010	5:05:56 PM	SiCl4 post valve closed
9/15/2010	5:05:56 PM	Main Vac valve closed
9/15/2010	5:05:56 PM	Bypass valve closed
9/15/2010	5:05:56 PM	H2 valve opened
9/15/2010	5:05:56 PM	Bubbler valve opened
9/15/2010	5:05:56 PM	Helium MFC set to  0.000000
9/15/2010	5:05:56 PM	H2 MFC set to  500.000000
9/15/2010	5:05:56 PM	BCl3 MFC set to  0.000000
9/15/2010	5:05:56 PM	PHl3 MFC set to  0.000000
9/15/2010	5:05:56 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:05:56 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:05:56 PM	Tube furnace set to 750
9/15/2010	5:25:56 PM	H2 valve closed
9/15/2010	5:25:56 PM	BCl3 valve closed
9/15/2010	5:25:56 PM	PH3 valve closed
9/15/2010	5:25:56 PM	SiCl4 pre valve closed
9/15/2010	5:25:56 PM	SiCl4 post valve closed
9/15/2010	5:25:56 PM	Main Vac valve closed
9/15/2010	5:25:56 PM	Bypass valve closed
9/15/2010	5:25:56 PM	Helium valve opened
9/15/2010	5:25:56 PM	Bubbler valve opened
9/15/2010	5:25:56 PM	Helium MFC set to  500.000000
9/15/2010	5:25:56 PM	H2 MFC set to  0.000000
9/15/2010	5:25:56 PM	BCl3 MFC set to  0.000000
9/15/2010	5:25:56 PM	PHl3 MFC set to  0.000000
9/15/2010	5:25:56 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:25:56 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:25:56 PM	Tube furnace set to 0
9/15/2010	5:32:29 PM	Run aborted at 5:32 PM
9/15/2010	5:32:29 PM	Helium valve closed
9/15/2010	5:32:29 PM	H2 valve closed
9/15/2010	5:32:29 PM	BCl3 valve closed
9/15/2010	5:32:29 PM	PH3 valve closed
9/15/2010	5:32:29 PM	SiCl4 pre valve closed
9/15/2010	5:32:29 PM	SiCl4 post valve closed
9/15/2010	5:32:29 PM	Bypass valve closed
9/15/2010	5:32:29 PM	Main Vac valve closed
9/15/2010	5:32:29 PM	Bubbler valve closed
9/15/2010	5:32:29 PM	Helium MFC set to  0.000000
9/15/2010	5:32:29 PM	H2 MFC set to  0.000000
9/15/2010	5:32:29 PM	BCl3 MFC set to  0.000000
9/15/2010	5:32:29 PM	PHl3 MFC set to  0.000000
9/15/2010	5:32:29 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:32:30 PM	Tube furnace set to 0
9/15/2010	5:32:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	5:32:35 PM	Recipe started at 5:32 PM
9/15/2010	5:32:35 PM	H2 valve closed
9/15/2010	5:32:35 PM	BCl3 valve closed
9/15/2010	5:32:35 PM	PH3 valve closed
9/15/2010	5:32:35 PM	SiCl4 pre valve closed
9/15/2010	5:32:35 PM	SiCl4 post valve closed
9/15/2010	5:32:35 PM	Main Vac valve closed
9/15/2010	5:32:35 PM	Bypass valve closed
9/15/2010	5:32:35 PM	Bubbler valve closed
9/15/2010	5:32:35 PM	Helium valve opened
9/15/2010	5:32:35 PM	Helium MFC set to  500.000000
9/15/2010	5:32:35 PM	H2 MFC set to  0.000000
9/15/2010	5:32:35 PM	BCl3 MFC set to  0.000000
9/15/2010	5:32:35 PM	PHl3 MFC set to  0.000000
9/15/2010	5:32:35 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:32:35 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:32:35 PM	Tube furnace set to 0
9/15/2010	5:32:35 PM	Helium valve closed
9/15/2010	5:32:35 PM	H2 valve closed
9/15/2010	5:32:35 PM	BCl3 valve closed
9/15/2010	5:32:35 PM	PH3 valve closed
9/15/2010	5:32:35 PM	SiCl4 pre valve closed
9/15/2010	5:32:35 PM	SiCl4 post valve closed
9/15/2010	5:32:35 PM	Main Vac valve closed
9/15/2010	5:32:35 PM	Bypass valve closed
9/15/2010	5:32:35 PM	Bubbler valve closed
9/15/2010	5:32:35 PM	Helium MFC set to  0.000000
9/15/2010	5:32:35 PM	H2 MFC set to  0.000000
9/15/2010	5:32:35 PM	BCl3 MFC set to  0.000000
9/15/2010	5:32:35 PM	PHl3 MFC set to  0.000000
9/15/2010	5:32:35 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:32:35 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:32:36 PM	Tube furnace set to 0
9/15/2010	5:32:36 PM	Run finished at 5:32 PM
9/15/2010	5:32:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	5:41:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	5:41:48 PM	Recipe started at 5:41 PM
9/15/2010	5:41:48 PM	Helium valve closed
9/15/2010	5:41:48 PM	H2 valve closed
9/15/2010	5:41:48 PM	BCl3 valve closed
9/15/2010	5:41:48 PM	PH3 valve closed
9/15/2010	5:41:48 PM	SiCl4 pre valve closed
9/15/2010	5:41:48 PM	SiCl4 post valve closed
9/15/2010	5:41:48 PM	Main Vac valve closed
9/15/2010	5:41:48 PM	Bubbler valve closed
9/15/2010	5:41:48 PM	Bypass valve opened
9/15/2010	5:41:48 PM	Helium MFC set to  0.000000
9/15/2010	5:41:48 PM	H2 MFC set to  0.000000
9/15/2010	5:41:48 PM	BCl3 MFC set to  0.000000
9/15/2010	5:41:48 PM	PHl3 MFC set to  0.000000
9/15/2010	5:41:48 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:41:48 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:41:48 PM	Tube furnace set to 0
9/15/2010	5:42:28 PM	Helium valve closed
9/15/2010	5:42:28 PM	H2 valve closed
9/15/2010	5:42:28 PM	BCl3 valve closed
9/15/2010	5:42:28 PM	PH3 valve closed
9/15/2010	5:42:28 PM	SiCl4 pre valve closed
9/15/2010	5:42:28 PM	SiCl4 post valve closed
9/15/2010	5:42:29 PM	Bubbler valve closed
9/15/2010	5:42:29 PM	Main Vac valve opened
9/15/2010	5:42:29 PM	Bypass valve opened
9/15/2010	5:42:29 PM	Helium MFC set to  0.000000
9/15/2010	5:42:29 PM	H2 MFC set to  0.000000
9/15/2010	5:42:29 PM	BCl3 MFC set to  0.000000
9/15/2010	5:42:29 PM	PHl3 MFC set to  0.000000
9/15/2010	5:42:29 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:42:29 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:42:29 PM	Tube furnace set to 0
9/15/2010	5:42:29 PM	Run finished at 5:42 PM
9/15/2010	5:42:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	5:45:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	5:45:13 PM	Recipe started at 5:45 PM
9/15/2010	5:45:13 PM	Helium valve closed
9/15/2010	5:45:13 PM	H2 valve closed
9/15/2010	5:45:13 PM	BCl3 valve closed
9/15/2010	5:45:13 PM	PH3 valve closed
9/15/2010	5:45:13 PM	SiCl4 pre valve closed
9/15/2010	5:45:13 PM	SiCl4 post valve closed
9/15/2010	5:45:13 PM	Main Vac valve closed
9/15/2010	5:45:13 PM	Bubbler valve closed
9/15/2010	5:45:13 PM	Bypass valve opened
9/15/2010	5:45:13 PM	Helium MFC set to  0.000000
9/15/2010	5:45:13 PM	H2 MFC set to  0.000000
9/15/2010	5:45:13 PM	BCl3 MFC set to  0.000000
9/15/2010	5:45:13 PM	PHl3 MFC set to  0.000000
9/15/2010	5:45:13 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:45:13 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:45:13 PM	Tube furnace set to 0
9/15/2010	5:45:13 PM	Helium valve closed
9/15/2010	5:45:13 PM	H2 valve closed
9/15/2010	5:45:13 PM	BCl3 valve closed
9/15/2010	5:45:13 PM	PH3 valve closed
9/15/2010	5:45:13 PM	SiCl4 pre valve closed
9/15/2010	5:45:13 PM	SiCl4 post valve closed
9/15/2010	5:45:13 PM	Bubbler valve closed
9/15/2010	5:45:13 PM	Main Vac valve opened
9/15/2010	5:45:13 PM	Bypass valve opened
9/15/2010	5:45:13 PM	Helium MFC set to  0.000000
9/15/2010	5:45:13 PM	H2 MFC set to  0.000000
9/15/2010	5:45:13 PM	BCl3 MFC set to  0.000000
9/15/2010	5:45:13 PM	PHl3 MFC set to  0.000000
9/15/2010	5:45:13 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:45:13 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:45:14 PM	Tube furnace set to 0
9/15/2010	5:46:14 PM	H2 valve closed
9/15/2010	5:46:14 PM	BCl3 valve closed
9/15/2010	5:46:14 PM	PH3 valve closed
9/15/2010	5:46:14 PM	SiCl4 pre valve closed
9/15/2010	5:46:14 PM	SiCl4 post valve closed
9/15/2010	5:46:14 PM	Bubbler valve closed
9/15/2010	5:46:14 PM	Helium valve opened
9/15/2010	5:46:14 PM	Main Vac valve opened
9/15/2010	5:46:14 PM	Bypass valve opened
9/15/2010	5:46:14 PM	Helium MFC set to  100.000000
9/15/2010	5:46:14 PM	H2 MFC set to  0.000000
9/15/2010	5:46:14 PM	BCl3 MFC set to  0.000000
9/15/2010	5:46:14 PM	PHl3 MFC set to  0.000000
9/15/2010	5:46:14 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:46:14 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:46:14 PM	Tube furnace set to 0
9/15/2010	5:47:14 PM	Helium valve closed
9/15/2010	5:47:14 PM	H2 valve closed
9/15/2010	5:47:14 PM	BCl3 valve closed
9/15/2010	5:47:14 PM	PH3 valve closed
9/15/2010	5:47:14 PM	SiCl4 pre valve closed
9/15/2010	5:47:14 PM	SiCl4 post valve closed
9/15/2010	5:47:14 PM	Bubbler valve closed
9/15/2010	5:47:14 PM	Main Vac valve opened
9/15/2010	5:47:14 PM	Bypass valve opened
9/15/2010	5:47:14 PM	Helium MFC set to  0.000000
9/15/2010	5:47:14 PM	H2 MFC set to  0.000000
9/15/2010	5:47:14 PM	BCl3 MFC set to  0.000000
9/15/2010	5:47:14 PM	PHl3 MFC set to  0.000000
9/15/2010	5:47:14 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:47:14 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:47:14 PM	Tube furnace set to 0
9/15/2010	5:48:14 PM	H2 valve closed
9/15/2010	5:48:14 PM	BCl3 valve closed
9/15/2010	5:48:14 PM	PH3 valve closed
9/15/2010	5:48:14 PM	SiCl4 pre valve closed
9/15/2010	5:48:14 PM	SiCl4 post valve closed
9/15/2010	5:48:14 PM	Bubbler valve closed
9/15/2010	5:48:14 PM	Helium valve opened
9/15/2010	5:48:14 PM	Main Vac valve opened
9/15/2010	5:48:14 PM	Bypass valve opened
9/15/2010	5:48:14 PM	Helium MFC set to  100.000000
9/15/2010	5:48:14 PM	H2 MFC set to  0.000000
9/15/2010	5:48:14 PM	BCl3 MFC set to  0.000000
9/15/2010	5:48:14 PM	PHl3 MFC set to  0.000000
9/15/2010	5:48:14 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:48:14 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:48:14 PM	Tube furnace set to 0
9/15/2010	5:49:14 PM	Helium valve closed
9/15/2010	5:49:14 PM	H2 valve closed
9/15/2010	5:49:14 PM	BCl3 valve closed
9/15/2010	5:49:14 PM	PH3 valve closed
9/15/2010	5:49:14 PM	SiCl4 pre valve closed
9/15/2010	5:49:14 PM	SiCl4 post valve closed
9/15/2010	5:49:14 PM	Bubbler valve closed
9/15/2010	5:49:14 PM	Main Vac valve opened
9/15/2010	5:49:14 PM	Bypass valve opened
9/15/2010	5:49:14 PM	Helium MFC set to  0.000000
9/15/2010	5:49:14 PM	H2 MFC set to  0.000000
9/15/2010	5:49:14 PM	BCl3 MFC set to  0.000000
9/15/2010	5:49:14 PM	PHl3 MFC set to  0.000000
9/15/2010	5:49:14 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:49:14 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:49:14 PM	Tube furnace set to 0
9/15/2010	5:50:14 PM	H2 valve closed
9/15/2010	5:50:14 PM	BCl3 valve closed
9/15/2010	5:50:14 PM	PH3 valve closed
9/15/2010	5:50:14 PM	SiCl4 pre valve closed
9/15/2010	5:50:14 PM	SiCl4 post valve closed
9/15/2010	5:50:14 PM	Bubbler valve closed
9/15/2010	5:50:14 PM	Helium valve opened
9/15/2010	5:50:14 PM	Main Vac valve opened
9/15/2010	5:50:14 PM	Bypass valve opened
9/15/2010	5:50:14 PM	Helium MFC set to  100.000000
9/15/2010	5:50:14 PM	H2 MFC set to  0.000000
9/15/2010	5:50:14 PM	BCl3 MFC set to  0.000000
9/15/2010	5:50:14 PM	PHl3 MFC set to  0.000000
9/15/2010	5:50:14 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:50:14 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:50:15 PM	Tube furnace set to 0
9/15/2010	5:51:15 PM	Helium valve closed
9/15/2010	5:51:15 PM	H2 valve closed
9/15/2010	5:51:15 PM	BCl3 valve closed
9/15/2010	5:51:15 PM	PH3 valve closed
9/15/2010	5:51:15 PM	SiCl4 pre valve closed
9/15/2010	5:51:15 PM	SiCl4 post valve closed
9/15/2010	5:51:15 PM	Bubbler valve closed
9/15/2010	5:51:15 PM	Main Vac valve opened
9/15/2010	5:51:15 PM	Bypass valve opened
9/15/2010	5:51:15 PM	Helium MFC set to  0.000000
9/15/2010	5:51:15 PM	H2 MFC set to  0.000000
9/15/2010	5:51:15 PM	BCl3 MFC set to  0.000000
9/15/2010	5:51:15 PM	PHl3 MFC set to  0.000000
9/15/2010	5:51:15 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:51:15 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:51:15 PM	Tube furnace set to 0
9/15/2010	5:52:15 PM	H2 valve closed
9/15/2010	5:52:15 PM	BCl3 valve closed
9/15/2010	5:52:15 PM	PH3 valve closed
9/15/2010	5:52:15 PM	SiCl4 pre valve closed
9/15/2010	5:52:15 PM	SiCl4 post valve closed
9/15/2010	5:52:15 PM	Bubbler valve closed
9/15/2010	5:52:15 PM	Helium valve opened
9/15/2010	5:52:15 PM	Main Vac valve opened
9/15/2010	5:52:15 PM	Bypass valve opened
9/15/2010	5:52:15 PM	Helium MFC set to  100.000000
9/15/2010	5:52:15 PM	H2 MFC set to  0.000000
9/15/2010	5:52:15 PM	BCl3 MFC set to  0.000000
9/15/2010	5:52:15 PM	PHl3 MFC set to  0.000000
9/15/2010	5:52:15 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:52:15 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:52:15 PM	Tube furnace set to 0
9/15/2010	5:53:15 PM	Helium valve closed
9/15/2010	5:53:15 PM	H2 valve closed
9/15/2010	5:53:15 PM	BCl3 valve closed
9/15/2010	5:53:15 PM	PH3 valve closed
9/15/2010	5:53:15 PM	SiCl4 pre valve closed
9/15/2010	5:53:15 PM	SiCl4 post valve closed
9/15/2010	5:53:15 PM	Bubbler valve closed
9/15/2010	5:53:15 PM	Main Vac valve opened
9/15/2010	5:53:15 PM	Bypass valve opened
9/15/2010	5:53:15 PM	Helium MFC set to  0.000000
9/15/2010	5:53:15 PM	H2 MFC set to  0.000000
9/15/2010	5:53:15 PM	BCl3 MFC set to  0.000000
9/15/2010	5:53:15 PM	PHl3 MFC set to  0.000000
9/15/2010	5:53:15 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:53:15 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:53:15 PM	Tube furnace set to 0
9/15/2010	5:54:15 PM	H2 valve closed
9/15/2010	5:54:15 PM	BCl3 valve closed
9/15/2010	5:54:15 PM	PH3 valve closed
9/15/2010	5:54:15 PM	SiCl4 pre valve closed
9/15/2010	5:54:15 PM	SiCl4 post valve closed
9/15/2010	5:54:15 PM	Bubbler valve closed
9/15/2010	5:54:15 PM	Helium valve opened
9/15/2010	5:54:15 PM	Main Vac valve opened
9/15/2010	5:54:15 PM	Bypass valve opened
9/15/2010	5:54:15 PM	Helium MFC set to  100.000000
9/15/2010	5:54:15 PM	H2 MFC set to  0.000000
9/15/2010	5:54:15 PM	BCl3 MFC set to  0.000000
9/15/2010	5:54:15 PM	PHl3 MFC set to  0.000000
9/15/2010	5:54:15 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:54:15 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:54:15 PM	Tube furnace set to 0
9/15/2010	5:55:15 PM	Helium valve closed
9/15/2010	5:55:15 PM	H2 valve closed
9/15/2010	5:55:15 PM	BCl3 valve closed
9/15/2010	5:55:15 PM	PH3 valve closed
9/15/2010	5:55:15 PM	SiCl4 pre valve closed
9/15/2010	5:55:15 PM	SiCl4 post valve closed
9/15/2010	5:55:15 PM	Bubbler valve closed
9/15/2010	5:55:15 PM	Main Vac valve opened
9/15/2010	5:55:15 PM	Bypass valve opened
9/15/2010	5:55:15 PM	Helium MFC set to  0.000000
9/15/2010	5:55:15 PM	H2 MFC set to  0.000000
9/15/2010	5:55:15 PM	BCl3 MFC set to  0.000000
9/15/2010	5:55:15 PM	PHl3 MFC set to  0.000000
9/15/2010	5:55:15 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:55:15 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:55:16 PM	Tube furnace set to 0
9/15/2010	5:56:16 PM	H2 valve closed
9/15/2010	5:56:16 PM	BCl3 valve closed
9/15/2010	5:56:16 PM	PH3 valve closed
9/15/2010	5:56:16 PM	SiCl4 pre valve closed
9/15/2010	5:56:16 PM	SiCl4 post valve closed
9/15/2010	5:56:16 PM	Bubbler valve closed
9/15/2010	5:56:16 PM	Helium valve opened
9/15/2010	5:56:16 PM	Main Vac valve opened
9/15/2010	5:56:16 PM	Bypass valve opened
9/15/2010	5:56:16 PM	Helium MFC set to  100.000000
9/15/2010	5:56:16 PM	H2 MFC set to  0.000000
9/15/2010	5:56:16 PM	BCl3 MFC set to  0.000000
9/15/2010	5:56:16 PM	PHl3 MFC set to  0.000000
9/15/2010	5:56:16 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:56:16 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:56:16 PM	Tube furnace set to 0
9/15/2010	5:57:16 PM	Helium valve closed
9/15/2010	5:57:16 PM	H2 valve closed
9/15/2010	5:57:16 PM	BCl3 valve closed
9/15/2010	5:57:16 PM	PH3 valve closed
9/15/2010	5:57:16 PM	SiCl4 pre valve closed
9/15/2010	5:57:16 PM	SiCl4 post valve closed
9/15/2010	5:57:16 PM	Bubbler valve closed
9/15/2010	5:57:16 PM	Main Vac valve opened
9/15/2010	5:57:16 PM	Bypass valve opened
9/15/2010	5:57:16 PM	Helium MFC set to  0.000000
9/15/2010	5:57:16 PM	H2 MFC set to  0.000000
9/15/2010	5:57:16 PM	BCl3 MFC set to  0.000000
9/15/2010	5:57:16 PM	PHl3 MFC set to  0.000000
9/15/2010	5:57:16 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:57:16 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:57:16 PM	Tube furnace set to 0
9/15/2010	5:58:16 PM	H2 valve closed
9/15/2010	5:58:16 PM	BCl3 valve closed
9/15/2010	5:58:16 PM	PH3 valve closed
9/15/2010	5:58:16 PM	SiCl4 pre valve closed
9/15/2010	5:58:16 PM	SiCl4 post valve closed
9/15/2010	5:58:16 PM	Bubbler valve closed
9/15/2010	5:58:16 PM	Helium valve opened
9/15/2010	5:58:16 PM	Main Vac valve opened
9/15/2010	5:58:16 PM	Bypass valve opened
9/15/2010	5:58:16 PM	Helium MFC set to  100.000000
9/15/2010	5:58:16 PM	H2 MFC set to  0.000000
9/15/2010	5:58:16 PM	BCl3 MFC set to  0.000000
9/15/2010	5:58:16 PM	PHl3 MFC set to  0.000000
9/15/2010	5:58:16 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:58:16 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:58:16 PM	Tube furnace set to 0
9/15/2010	5:59:16 PM	Helium valve closed
9/15/2010	5:59:16 PM	H2 valve closed
9/15/2010	5:59:16 PM	BCl3 valve closed
9/15/2010	5:59:16 PM	PH3 valve closed
9/15/2010	5:59:16 PM	SiCl4 pre valve closed
9/15/2010	5:59:16 PM	SiCl4 post valve closed
9/15/2010	5:59:16 PM	Bubbler valve closed
9/15/2010	5:59:16 PM	Main Vac valve opened
9/15/2010	5:59:16 PM	Bypass valve opened
9/15/2010	5:59:16 PM	Helium MFC set to  0.000000
9/15/2010	5:59:16 PM	H2 MFC set to  0.000000
9/15/2010	5:59:16 PM	BCl3 MFC set to  0.000000
9/15/2010	5:59:16 PM	PHl3 MFC set to  0.000000
9/15/2010	5:59:16 PM	SiCl4 MFC set to  0.000000
9/15/2010	5:59:16 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	5:59:17 PM	Tube furnace set to 0
9/15/2010	6:00:17 PM	H2 valve closed
9/15/2010	6:00:17 PM	BCl3 valve closed
9/15/2010	6:00:17 PM	PH3 valve closed
9/15/2010	6:00:17 PM	SiCl4 pre valve closed
9/15/2010	6:00:17 PM	SiCl4 post valve closed
9/15/2010	6:00:17 PM	Bubbler valve closed
9/15/2010	6:00:17 PM	Helium valve opened
9/15/2010	6:00:17 PM	Main Vac valve opened
9/15/2010	6:00:17 PM	Bypass valve opened
9/15/2010	6:00:17 PM	Helium MFC set to  100.000000
9/15/2010	6:00:17 PM	H2 MFC set to  0.000000
9/15/2010	6:00:17 PM	BCl3 MFC set to  0.000000
9/15/2010	6:00:17 PM	PHl3 MFC set to  0.000000
9/15/2010	6:00:17 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:00:17 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:00:17 PM	Tube furnace set to 0
9/15/2010	6:01:17 PM	Helium valve closed
9/15/2010	6:01:17 PM	H2 valve closed
9/15/2010	6:01:17 PM	BCl3 valve closed
9/15/2010	6:01:17 PM	PH3 valve closed
9/15/2010	6:01:17 PM	SiCl4 pre valve closed
9/15/2010	6:01:17 PM	SiCl4 post valve closed
9/15/2010	6:01:17 PM	Bubbler valve closed
9/15/2010	6:01:17 PM	Main Vac valve opened
9/15/2010	6:01:17 PM	Bypass valve opened
9/15/2010	6:01:17 PM	Helium MFC set to  0.000000
9/15/2010	6:01:17 PM	H2 MFC set to  0.000000
9/15/2010	6:01:17 PM	BCl3 MFC set to  0.000000
9/15/2010	6:01:17 PM	PHl3 MFC set to  0.000000
9/15/2010	6:01:17 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:01:17 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:01:17 PM	Tube furnace set to 0
9/15/2010	6:02:17 PM	H2 valve closed
9/15/2010	6:02:17 PM	BCl3 valve closed
9/15/2010	6:02:17 PM	PH3 valve closed
9/15/2010	6:02:17 PM	SiCl4 pre valve closed
9/15/2010	6:02:17 PM	SiCl4 post valve closed
9/15/2010	6:02:17 PM	Bubbler valve closed
9/15/2010	6:02:17 PM	Helium valve opened
9/15/2010	6:02:17 PM	Main Vac valve opened
9/15/2010	6:02:17 PM	Bypass valve opened
9/15/2010	6:02:17 PM	Helium MFC set to  100.000000
9/15/2010	6:02:17 PM	H2 MFC set to  0.000000
9/15/2010	6:02:17 PM	BCl3 MFC set to  0.000000
9/15/2010	6:02:17 PM	PHl3 MFC set to  0.000000
9/15/2010	6:02:17 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:02:17 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:02:17 PM	Tube furnace set to 0
9/15/2010	6:03:17 PM	Helium valve closed
9/15/2010	6:03:17 PM	H2 valve closed
9/15/2010	6:03:17 PM	BCl3 valve closed
9/15/2010	6:03:17 PM	PH3 valve closed
9/15/2010	6:03:17 PM	SiCl4 pre valve closed
9/15/2010	6:03:17 PM	SiCl4 post valve closed
9/15/2010	6:03:17 PM	Bubbler valve closed
9/15/2010	6:03:17 PM	Main Vac valve opened
9/15/2010	6:03:17 PM	Bypass valve opened
9/15/2010	6:03:17 PM	Helium MFC set to  0.000000
9/15/2010	6:03:17 PM	H2 MFC set to  0.000000
9/15/2010	6:03:17 PM	BCl3 MFC set to  0.000000
9/15/2010	6:03:17 PM	PHl3 MFC set to  0.000000
9/15/2010	6:03:17 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:03:17 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:03:17 PM	Tube furnace set to 0
9/15/2010	6:04:17 PM	H2 valve closed
9/15/2010	6:04:17 PM	BCl3 valve closed
9/15/2010	6:04:17 PM	PH3 valve closed
9/15/2010	6:04:17 PM	SiCl4 pre valve closed
9/15/2010	6:04:17 PM	SiCl4 post valve closed
9/15/2010	6:04:17 PM	Bubbler valve closed
9/15/2010	6:04:17 PM	Helium valve opened
9/15/2010	6:04:17 PM	Main Vac valve opened
9/15/2010	6:04:17 PM	Bypass valve opened
9/15/2010	6:04:17 PM	Helium MFC set to  100.000000
9/15/2010	6:04:17 PM	H2 MFC set to  0.000000
9/15/2010	6:04:17 PM	BCl3 MFC set to  0.000000
9/15/2010	6:04:17 PM	PHl3 MFC set to  0.000000
9/15/2010	6:04:17 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:04:17 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:04:18 PM	Tube furnace set to 0
9/15/2010	6:05:18 PM	Helium valve closed
9/15/2010	6:05:18 PM	H2 valve closed
9/15/2010	6:05:18 PM	BCl3 valve closed
9/15/2010	6:05:18 PM	PH3 valve closed
9/15/2010	6:05:18 PM	SiCl4 pre valve closed
9/15/2010	6:05:18 PM	SiCl4 post valve closed
9/15/2010	6:05:18 PM	Bubbler valve closed
9/15/2010	6:05:18 PM	Main Vac valve opened
9/15/2010	6:05:18 PM	Bypass valve opened
9/15/2010	6:05:18 PM	Helium MFC set to  0.000000
9/15/2010	6:05:18 PM	H2 MFC set to  0.000000
9/15/2010	6:05:18 PM	BCl3 MFC set to  0.000000
9/15/2010	6:05:18 PM	PHl3 MFC set to  0.000000
9/15/2010	6:05:18 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:05:18 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:05:18 PM	Tube furnace set to 0
9/15/2010	6:05:19 PM	Run finished at 6:05 PM
9/15/2010	6:05:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/15/2010	6:12:30 PM	Helium valve opened
9/15/2010	6:12:32 PM	Helium MFC set to  100.000000
9/15/2010	6:22:33 PM	Helium valve closed
9/15/2010	6:22:35 PM	Helium MFC set to  0.000000
9/15/2010	6:22:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	6:22:41 PM	Recipe started at 6:22 PM
9/15/2010	6:22:41 PM	Helium valve closed
9/15/2010	6:22:41 PM	H2 valve closed
9/15/2010	6:22:41 PM	BCl3 valve closed
9/15/2010	6:22:41 PM	PH3 valve closed
9/15/2010	6:22:41 PM	SiCl4 pre valve closed
9/15/2010	6:22:41 PM	SiCl4 post valve closed
9/15/2010	6:22:41 PM	Main Vac valve closed
9/15/2010	6:22:41 PM	Bubbler valve closed
9/15/2010	6:22:41 PM	Bypass valve opened
9/15/2010	6:22:41 PM	Helium MFC set to  0.000000
9/15/2010	6:22:41 PM	H2 MFC set to  0.000000
9/15/2010	6:22:41 PM	BCl3 MFC set to  0.000000
9/15/2010	6:22:41 PM	PHl3 MFC set to  0.000000
9/15/2010	6:22:41 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:22:41 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:22:42 PM	Tube furnace set to 0
9/15/2010	6:22:42 PM	Helium valve closed
9/15/2010	6:22:42 PM	H2 valve closed
9/15/2010	6:22:42 PM	BCl3 valve closed
9/15/2010	6:22:42 PM	PH3 valve closed
9/15/2010	6:22:42 PM	SiCl4 pre valve closed
9/15/2010	6:22:42 PM	SiCl4 post valve closed
9/15/2010	6:22:42 PM	Bubbler valve closed
9/15/2010	6:22:42 PM	Main Vac valve opened
9/15/2010	6:22:42 PM	Bypass valve opened
9/15/2010	6:22:42 PM	Helium MFC set to  0.000000
9/15/2010	6:22:42 PM	H2 MFC set to  0.000000
9/15/2010	6:22:42 PM	BCl3 MFC set to  0.000000
9/15/2010	6:22:42 PM	PHl3 MFC set to  0.000000
9/15/2010	6:22:42 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:22:42 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:22:42 PM	Tube furnace set to 0
9/15/2010	6:22:42 PM	Run finished at 6:22 PM
9/15/2010	6:22:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	6:23:21 PM	Recipe started at 6:23 PM
9/15/2010	6:23:21 PM	Helium valve closed
9/15/2010	6:23:21 PM	BCl3 valve closed
9/15/2010	6:23:21 PM	PH3 valve closed
9/15/2010	6:23:21 PM	SiCl4 pre valve closed
9/15/2010	6:23:21 PM	SiCl4 post valve closed
9/15/2010	6:23:21 PM	Main Vac valve closed
9/15/2010	6:23:21 PM	Bypass valve closed
9/15/2010	6:23:21 PM	Bubbler valve closed
9/15/2010	6:23:21 PM	H2 valve opened
9/15/2010	6:23:21 PM	Helium MFC set to  0.000000
9/15/2010	6:23:21 PM	H2 MFC set to  500.000000
9/15/2010	6:23:21 PM	BCl3 MFC set to  0.000000
9/15/2010	6:23:21 PM	PHl3 MFC set to  0.000000
9/15/2010	6:23:21 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:23:21 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:23:21 PM	Tube furnace set to 1000
9/15/2010	6:24:42 PM	Helium valve closed
9/15/2010	6:24:42 PM	BCl3 valve closed
9/15/2010	6:24:42 PM	PH3 valve closed
9/15/2010	6:24:42 PM	SiCl4 pre valve closed
9/15/2010	6:24:42 PM	SiCl4 post valve closed
9/15/2010	6:24:42 PM	Main Vac valve closed
9/15/2010	6:24:42 PM	Bypass valve closed
9/15/2010	6:24:42 PM	H2 valve opened
9/15/2010	6:24:42 PM	Bubbler valve opened
9/15/2010	6:24:42 PM	Helium MFC set to  0.000000
9/15/2010	6:24:42 PM	H2 MFC set to  500.000000
9/15/2010	6:24:42 PM	BCl3 MFC set to  0.000000
9/15/2010	6:24:42 PM	PHl3 MFC set to  0.000000
9/15/2010	6:24:42 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:24:42 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:24:42 PM	Tube furnace set to 1000
9/15/2010	6:44:42 PM	Helium valve closed
9/15/2010	6:44:42 PM	PH3 valve closed
9/15/2010	6:44:42 PM	Main Vac valve closed
9/15/2010	6:44:42 PM	Bypass valve closed
9/15/2010	6:44:42 PM	H2 valve opened
9/15/2010	6:44:42 PM	BCl3 valve opened
9/15/2010	6:44:42 PM	SiCl4 pre valve opened
9/15/2010	6:44:42 PM	SiCl4 post valve opened
9/15/2010	6:44:42 PM	Bubbler valve opened
9/15/2010	6:44:42 PM	Helium MFC set to  0.000000
9/15/2010	6:44:42 PM	H2 MFC set to  500.000000
9/15/2010	6:44:42 PM	BCl3 MFC set to  29.000000
9/15/2010	6:44:42 PM	PHl3 MFC set to  0.000000
9/15/2010	6:44:42 PM	SiCl4 MFC set to  50.000000
9/15/2010	6:44:42 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:44:42 PM	Tube furnace set to 1000
9/15/2010	6:56:42 PM	Helium valve closed
9/15/2010	6:56:42 PM	BCl3 valve closed
9/15/2010	6:56:42 PM	PH3 valve closed
9/15/2010	6:56:42 PM	SiCl4 pre valve closed
9/15/2010	6:56:42 PM	SiCl4 post valve closed
9/15/2010	6:56:42 PM	Main Vac valve closed
9/15/2010	6:56:42 PM	Bypass valve closed
9/15/2010	6:56:42 PM	H2 valve opened
9/15/2010	6:56:42 PM	Bubbler valve opened
9/15/2010	6:56:42 PM	Helium MFC set to  0.000000
9/15/2010	6:56:42 PM	H2 MFC set to  500.000000
9/15/2010	6:56:42 PM	BCl3 MFC set to  0.000000
9/15/2010	6:56:42 PM	PHl3 MFC set to  0.000000
9/15/2010	6:56:42 PM	SiCl4 MFC set to  0.000000
9/15/2010	6:56:42 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	6:56:42 PM	Tube furnace set to 750
9/15/2010	7:16:43 PM	H2 valve closed
9/15/2010	7:16:43 PM	BCl3 valve closed
9/15/2010	7:16:43 PM	PH3 valve closed
9/15/2010	7:16:43 PM	SiCl4 pre valve closed
9/15/2010	7:16:43 PM	SiCl4 post valve closed
9/15/2010	7:16:43 PM	Main Vac valve closed
9/15/2010	7:16:43 PM	Bypass valve closed
9/15/2010	7:16:43 PM	Helium valve opened
9/15/2010	7:16:43 PM	Bubbler valve opened
9/15/2010	7:16:43 PM	Helium MFC set to  500.000000
9/15/2010	7:16:43 PM	H2 MFC set to  0.000000
9/15/2010	7:16:43 PM	BCl3 MFC set to  0.000000
9/15/2010	7:16:43 PM	PHl3 MFC set to  0.000000
9/15/2010	7:16:43 PM	SiCl4 MFC set to  0.000000
9/15/2010	7:16:43 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:16:43 PM	Tube furnace set to 0
9/15/2010	7:22:04 PM	Run aborted at 7:22 PM
9/15/2010	7:22:04 PM	Helium valve closed
9/15/2010	7:22:04 PM	H2 valve closed
9/15/2010	7:22:04 PM	BCl3 valve closed
9/15/2010	7:22:04 PM	PH3 valve closed
9/15/2010	7:22:04 PM	SiCl4 pre valve closed
9/15/2010	7:22:04 PM	SiCl4 post valve closed
9/15/2010	7:22:04 PM	Bypass valve closed
9/15/2010	7:22:04 PM	Main Vac valve closed
9/15/2010	7:22:04 PM	Bubbler valve closed
9/15/2010	7:22:04 PM	Helium MFC set to  0.000000
9/15/2010	7:22:04 PM	H2 MFC set to  0.000000
9/15/2010	7:22:04 PM	BCl3 MFC set to  0.000000
9/15/2010	7:22:04 PM	PHl3 MFC set to  0.000000
9/15/2010	7:22:04 PM	SiCl4 MFC set to  0.000000
9/15/2010	7:22:05 PM	Tube furnace set to 0
9/15/2010	7:22:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	7:22:06 PM	Recipe started at 7:22 PM
9/15/2010	7:22:06 PM	H2 valve closed
9/15/2010	7:22:06 PM	BCl3 valve closed
9/15/2010	7:22:06 PM	PH3 valve closed
9/15/2010	7:22:06 PM	SiCl4 pre valve closed
9/15/2010	7:22:06 PM	SiCl4 post valve closed
9/15/2010	7:22:06 PM	Main Vac valve closed
9/15/2010	7:22:06 PM	Bypass valve closed
9/15/2010	7:22:06 PM	Bubbler valve closed
9/15/2010	7:22:06 PM	Helium valve opened
9/15/2010	7:22:06 PM	Helium MFC set to  500.000000
9/15/2010	7:22:06 PM	H2 MFC set to  0.000000
9/15/2010	7:22:06 PM	BCl3 MFC set to  0.000000
9/15/2010	7:22:06 PM	PHl3 MFC set to  0.000000
9/15/2010	7:22:06 PM	SiCl4 MFC set to  0.000000
9/15/2010	7:22:06 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:22:06 PM	Tube furnace set to 0
9/15/2010	7:22:07 PM	Helium valve closed
9/15/2010	7:22:07 PM	H2 valve closed
9/15/2010	7:22:07 PM	BCl3 valve closed
9/15/2010	7:22:07 PM	PH3 valve closed
9/15/2010	7:22:07 PM	SiCl4 pre valve closed
9/15/2010	7:22:07 PM	SiCl4 post valve closed
9/15/2010	7:22:07 PM	Main Vac valve closed
9/15/2010	7:22:07 PM	Bypass valve closed
9/15/2010	7:22:07 PM	Bubbler valve closed
9/15/2010	7:22:07 PM	Helium MFC set to  0.000000
9/15/2010	7:22:07 PM	H2 MFC set to  0.000000
9/15/2010	7:22:07 PM	BCl3 MFC set to  0.000000
9/15/2010	7:22:07 PM	PHl3 MFC set to  0.000000
9/15/2010	7:22:07 PM	SiCl4 MFC set to  0.000000
9/15/2010	7:22:07 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:22:07 PM	Tube furnace set to 0
9/15/2010	7:22:07 PM	Run finished at 7:22 PM
9/15/2010	7:22:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/15/2010	7:23:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/15/2010	7:23:44 PM	Recipe started at 7:23 PM
9/15/2010	7:23:44 PM	Helium valve closed
9/15/2010	7:23:44 PM	H2 valve closed
9/15/2010	7:23:44 PM	BCl3 valve closed
9/15/2010	7:23:44 PM	PH3 valve closed
9/15/2010	7:23:44 PM	SiCl4 pre valve closed
9/15/2010	7:23:44 PM	SiCl4 post valve closed
9/15/2010	7:23:44 PM	Main Vac valve closed
9/15/2010	7:23:44 PM	Bubbler valve closed
9/15/2010	7:23:44 PM	Bypass valve opened
9/15/2010	7:23:44 PM	Helium MFC set to  0.000000
9/15/2010	7:23:44 PM	H2 MFC set to  0.000000
9/15/2010	7:23:44 PM	BCl3 MFC set to  0.000000
9/15/2010	7:23:44 PM	PHl3 MFC set to  0.000000
9/15/2010	7:23:44 PM	SiCl4 MFC set to  0.000000
9/15/2010	7:23:44 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:23:45 PM	Tube furnace set to 0
9/15/2010	7:24:22 PM	Helium valve closed
9/15/2010	7:24:22 PM	H2 valve closed
9/15/2010	7:24:22 PM	BCl3 valve closed
9/15/2010	7:24:22 PM	PH3 valve closed
9/15/2010	7:24:22 PM	SiCl4 pre valve closed
9/15/2010	7:24:22 PM	SiCl4 post valve closed
9/15/2010	7:24:22 PM	Bubbler valve closed
9/15/2010	7:24:22 PM	Main Vac valve opened
9/15/2010	7:24:22 PM	Bypass valve opened
9/15/2010	7:24:22 PM	Helium MFC set to  0.000000
9/15/2010	7:24:22 PM	H2 MFC set to  0.000000
9/15/2010	7:24:22 PM	BCl3 MFC set to  0.000000
9/15/2010	7:24:22 PM	PHl3 MFC set to  0.000000
9/15/2010	7:24:22 PM	SiCl4 MFC set to  0.000000
9/15/2010	7:24:22 PM	Bypass solenoid MFC set to  0.000000
9/15/2010	7:24:22 PM	Tube furnace set to 0
9/15/2010	7:24:22 PM	Run finished at 7:24 PM
9/15/2010	7:24:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
